Inventor · disambiguated record
Mitsuru Okuno
Also filed as: OKUNO MITSURU
5 granted patents·1 citations·filing 2006–2011
66Inventor score
Technology areasG03F
Top patents by PatentIndex Score
5 records- 0163US7682760B2Pattern formation method using Levenson-type mask and method of manufacturing Levenson-type maskRENESAS TECH CORP·Filed 2006·Granted Mar 23, 2010·1 cites·8 claims
- 0253US8367309B2Pattern formation method using levenson-type mask and method of manufacturing levenson-type maskRENESAS ELECTRONICS CORP·Filed 2011·Granted Feb 5, 2013·0 cites·4 claims
- 0350US7935462B2Pattern formation method using levenson-type mask and method of manufacturing levenson-type maskRENESAS ELECTRONICS CORP·Filed 2010·Granted May 3, 2011·0 cites·6 claims
- 0446US8071264B2Pattern formation method using levenson-type mask and method of manufacturing levenson-type maskOKUNO MITSURU·Filed 2011·Granted Dec 6, 2011·0 cites·4 claims
- 0538US8426087B2Photomask, manufacturing apparatus and method of semiconductor device using the same, and photomask feature layout methodMINAMIDE AYUMI·Filed 2011·Granted Apr 23, 2013·0 cites·10 claims
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