Assignee
MINAMIDE AYUMI
JP·3 granted patents·1 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0157US8119308B2Photomask, apparatus for manufacturing semiconductor device having the photomask, and method of manufacturing semiconductor device using the photomaskMINAMIDE AYUMI·Filed 2009·Granted Feb 21, 2012·1 cites·20 claims
- 0247US8563200B2Manufacturing method of photomask, method for optical proximity correction, and manufacturing method of semiconductor deviceMINAMIDE AYUMI·Filed 2012·Granted Oct 22, 2013·0 cites·5 claims
- 0338US8426087B2Photomask, manufacturing apparatus and method of semiconductor device using the same, and photomask feature layout methodMINAMIDE AYUMI·Filed 2011·Granted Apr 23, 2013·0 cites·10 claims
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