Inventor · disambiguated record
Matthew Panzer
Also filed as: PANZER MATTHEW · PANZER MATTHEW ALAN
11 granted patents·1 pending application·36 citations·filing 2013–2021
86Inventor score
Top patents by PatentIndex Score
12 records- 0194US10217625B2Continuous-wave laser-sustained plasma illumination sourceKLA TENCOR CORP·Filed 2016·Granted Feb 26, 2019·12 cites·45 claims
- 0291US9927094B2Plasma cell for providing VUV filtering in a laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2013·Granted Mar 27, 2018·11 cites·23 claims
- 0383US10032620B2Broadband light source including transparent portion with high hydroxide contentKLA TENCOR CORP·Filed 2015·Granted Jul 24, 2018·3 cites·14 claims
- 0482US10381216B2Continuous-wave laser-sustained plasma illumination sourceKLA TENCOR CORP·Filed 2018·Granted Aug 13, 2019·2 cites·17 claims
- 0580US8796652B2Laser sustained plasma bulb including waterKLA TENCOR CORP·Filed 2013·Granted Aug 5, 2014·4 cites·20 claims
- 0677US10283342B2Laser sustained plasma light source with graded absorption featuresKLA TENCOR CORP·Filed 2016·Granted May 7, 2019·2 cites·35 claims
- 0772US9709811B2System and method for separation of pump light and collected light in a laser pumped light sourceKLA TENCOR CORP·Filed 2014·Granted Jul 18, 2017·2 cites·49 claims
- 0869US2021231292A1Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light SourceKLA CORP·Filed 2021·Application pending·0 cites
- 0961US10976025B2Plasma cell for providing VUV filtering in a laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2018·Granted Apr 13, 2021·0 cites·8 claims
- 1061US10522340B2Broadband light source including transparent portion with high hydroxide contentKLA TENCOR CORP·Filed 2018·Granted Dec 31, 2019·0 cites·20 claims
- 1156US10520741B2System and method for separation of pump light and collected light in a laser pumped light sourceKLA TENCOR CORP·Filed 2017·Granted Dec 31, 2019·0 cites·20 claims
- 1238US10616987B2System and method for imaging a sample with an illumination source modified by a spatial selective wavelength filterKLA TENCOR CORP·Filed 2015·Granted Apr 7, 2020·0 cites·37 claims
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