Inventor · disambiguated record
Eugene Lopata
Also filed as: LOPATA EUGENE · LOPATA EUGENE S
8 granted patents·1 pending application·705 citations·filing 1988–2006
91Inventor score
Top patents by PatentIndex Score
9 records- 0196US7901783B2Low κ dielectric inorganic/organic hybrid films and method of makingAPPLIED MATERIALS INC·Filed 2006·Granted Mar 8, 2011·44 cites·10 claims
- 0295US6068884AMethod of making low κ dielectric inorganic/organic hybrid filmsSILCON VALLEY GROUP THERMAL SY·Filed 1998·Granted May 30, 2000·357 cites·34 claims
- 0393US4888199APlasma thin film deposition processBOC GROUP INC·Filed 1988·Granted Dec 19, 1989·86 cites·20 claims
- 0491US5904952AMethod of plasma enhanced silicon oxide depositionBOC GROUP INC·Filed 1997·Granted May 18, 1999·98 cites·18 claims
- 0587US6660391B1Low κ dielectric inorganic/organic hybrid films and method of makingASML US INC·Filed 1999·Granted Dec 9, 2003·67 cites·8 claims
- 0674US5487920AProcess for plasma-enhanced chemical vapor deposition of anti-fog and anti-scratch coatings onto various substratesBOC GROUP INC·Filed 1994·Granted Jan 30, 1996·44 cites·13 claims
- 0768US7153580B2Low κ dielectric inorganic/organic hybrid films and method of makingAVIZA TECH INC·Filed 2003·Granted Dec 26, 2006·8 cites·10 claims
- 0843US6855370B2Fluoropolymer interlayer dielectric by chemical vapor depositionDU PONT·Filed 2002·Granted Feb 15, 2005·1 cites·8 claims
- 0936US2006051506A1Nitridation of high-k dielectricsSENZAKI YOSHIHIDE·Filed 2004·Application pending·0 cites
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