Inventor · disambiguated record
Kazunori Iwamoto
Also filed as: IWAMOTO KAZUNORI
30 granted patents·1 pending application·1,268 citations·filing 1988–2008
98Inventor score
Top patents by PatentIndex Score
31 records- 0196US5684856AStage device and pattern transfer system using the sameCANON KK·Filed 1994·Granted Nov 4, 1997·133 cites·16 claims
- 0295US5483343AWavelength compensator in a helium ambienceCANON KK·Filed 1994·Granted Jan 9, 1996·100 cites·13 claims
- 0393US5781277AProjection exposure apparatus and exposure method and semiconductor device production method therewithCANON KK·Filed 1996·Granted Jul 14, 1998·109 cites·8 claims
- 0492US5191218AVacuum chuckCANON KK·Filed 1991·Granted Mar 2, 1993·146 cites·16 claims
- 0591US6819433B2Exposure apparatus including interferometer systemCANON KK·Filed 2002·Granted Nov 16, 2004·71 cites·37 claims
- 0691US5231291AWafer table and exposure apparatus with the sameCANON KK·Filed 1992·Granted Jul 27, 1993·149 cites·16 claims
- 0787US6717653B2Moving mechanism in exposure apparatus, and exposure apparatus having the sameCANON KK·Filed 2001·Granted Apr 6, 2004·39 cites·56 claims
- 0885US8244156B2Method for producing cleaning device and cleaning deviceIWAMOTO KAZUNORI·Filed 2008·Granted Aug 14, 2012·11 cites·6 claims
- 0985US5467720ASupport deviceCANON KK·Filed 1994·Granted Nov 21, 1995·88 cites·14 claims
- 1083US5933215AExposure apparatus and device manufacturing method using the sameCANON KK·Filed 1997·Granted Aug 3, 1999·50 cites·17 claims
- 1183US5909272AStage and exposure apparatus using sameCANON KK·Filed 1997·Granted Jun 1, 1999·53 cites·24 claims
- 1275US5128975AX-ray exposure systemCANON KK·Filed 1991·Granted Jul 7, 1992·28 cites·18 claims
- 1374US6891599B2Stage apparatus and exposure apparatusCANON KK·Filed 2002·Granted May 10, 2005·10 cites·17 claims
- 1474US5883932ASubstrate holding device and exposing apparatus using the sameCANON KK·Filed 1995·Granted Mar 16, 1999·38 cites·13 claims
- 1573US6008885AScanning exposure apparatusCANON KK·Filed 1997·Granted Dec 28, 1999·33 cites·30 claims
- 1670US4854444APrecise feeding mechanismCANON KK·Filed 1988·Granted Aug 8, 1989·36 cites·2 claims
- 1768US6133982AExposure apparatusCANON KK·Filed 1997·Granted Oct 17, 2000·26 cites·21 claims
- 1868US5999589ASubstrate holding device and exposing apparatus using the sameCANON KK·Filed 1998·Granted Dec 7, 1999·28 cites·16 claims
- 1966US6469773B1Stage apparatus, exposure apparatus and device manufacturing methodCANON KK·Filed 1998·Granted Oct 22, 2002·23 cites·72 claims
- 2062US6990386B2Moving mechanism and stage system in exposure apparatusCANON KK·Filed 2002·Granted Jan 24, 2006·6 cites·16 claims
- 2158US6867849B2Stage apparatus which supports interferometer, stage position measurement method, projection exposure apparatus, projection exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factoryCANON KK·Filed 2001·Granted Mar 15, 2005·5 cites·30 claims
- 2257US6965428B2Stage apparatus, exposure apparatus, and semiconductor device manufacturing methodCANON KK·Filed 2003·Granted Nov 15, 2005·5 cites·23 claims
- 2357US5168512AMethod of manufacture of semiconductor devicesCANON KK·Filed 1991·Granted Dec 1, 1992·26 cites·25 claims
- 2454US6069683AScanning exposure method and apparatusCANON KK·Filed 1997·Granted May 30, 2000·14 cites·13 claims
- 2551US7346414B2Moving mechanism and stage system in exposure apparatusCANON KK·Filed 2005·Granted Mar 18, 2008·0 cites·10 claims
- 2650US5160961ASubstrate holding deviceCANON KK·Filed 1991·Granted Nov 3, 1992·19 cites·19 claims
- 2747US5226523AConveying apparatus and method of controlling the sameCANON KK·Filed 1992·Granted Jul 13, 1993·8 cites·10 claims
- 2846US2006017909A1Stage apparatus, exposure apparatus, and semiconductor device manufacturing mehtodCANON KK·Filed 2005·Application pending·0 cites
- 2940US5687947AMounting methodCANON KK·Filed 1995·Granted Nov 18, 1997·8 cites·3 claims
- 3038US5640440ASubstrate conveying systemCANON KK·Filed 1995·Granted Jun 17, 1997·6 cites·12 claims
- 3128US6856404B2Scanning exposure method and apparatus, and device manufacturing method using the sameCANON KK·Filed 1999·Granted Feb 15, 2005·0 cites·10 claims
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