Inventor · disambiguated record
Marc Wilhelmus Maria Van Der Wijst
Also filed as: VAN DER WIJST MARC · VAN DER WIJST MARC WILHELMUS · VAN DER WIJST MARC WILHELMUS M · VAN DER WIJST MARC WILHELMUS MARIA
43 granted patents·6 pending applications·243 citations·filing 2002–2023
97Inventor score
Files withASML NETHERLANDS BV26BUTLER HANS13VAN DER WIJST MARC WILHELMUS MARIA4AMSL NETHERLANDS B V1ASML NETHERLAND BV1
Top patents by PatentIndex Score
49 records- 0195US6788386B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2002·Granted Sep 7, 2004·75 cites·16 claims
- 0294US7903866B2Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable objectASML NETHERLANDS BV·Filed 2007·Granted Mar 8, 2011·16 cites·33 claims
- 0388US8164737B2Lithographic apparatus having an active damping subassemblyBUTLER HANS·Filed 2008·Granted Apr 24, 2012·11 cites·17 claims
- 0485US10191393B2Lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Jan 29, 2019·3 cites·22 claims
- 0584US11150560B2Projection system and mirror and radiation source for a lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Oct 19, 2021·1 cites·7 claims
- 0684US7436484B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 14, 2008·20 cites·17 claims
- 0783US7554105B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jun 30, 2009·6 cites·22 claims
- 0882US9715171B2Imprint lithographic apparatus and imprint lithographic methodBUTLER HANS·Filed 2010·Granted Jul 25, 2017·4 cites·11 claims
- 0982US7999914B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Aug 16, 2011·5 cites·19 claims
- 1081US10732511B2Projection system and mirror and radiation source for a lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Aug 4, 2020·1 cites·19 claims
- 1181US9696630B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jul 4, 2017·2 cites·20 claims
- 1281US8144310B2Positioning system, lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2009·Granted Mar 27, 2012·5 cites·17 claims
- 1380US8553199B2Lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2008·Granted Oct 8, 2013·6 cites·22 claims
- 1479US8243258B2Lithographic apparatus having acoustic resonatorBUTLER HANS·Filed 2008·Granted Aug 14, 2012·5 cites·25 claims
- 1578US9134632B2Lithographic apparatus and device manufacturing methodVAN DER WIJST MARC WILHELMUS MARIA·Filed 2011·Granted Sep 15, 2015·3 cites·19 claims
- 1676US8174671B2Lithographic projection apparatus and method for controlling a support structureLOOPSTRA ERIK ROELOF·Filed 2008·Granted May 8, 2012·4 cites·38 claims
- 1775US10146133B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2016·Granted Dec 4, 2018·2 cites·20 claims
- 1873US10216093B2Projection system and minor and radiation source for a lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Feb 26, 2019·1 cites·27 claims
- 1973US8619232B2Method for damping an object, an active damping system, and a lithographic apparatusBUTLER HANS·Filed 2009·Granted Dec 31, 2013·3 cites·16 claims
- 2073US8059259B2Damping arrangement, active damping system, lithographic apparatus, and projection assemblyBUTLER HANS·Filed 2008·Granted Nov 15, 2011·6 cites·17 claims
- 2171US10649347B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted May 12, 2020·1 cites·20 claims
- 2271US9378722B2Lithographic apparatus with actuator to compensate acoustic vibrationBUTLER HANS·Filed 2008·Granted Jun 28, 2016·6 cites·28 claims
- 2371US8203694B2Lithographic apparatus, projection assembly and active dampingVAN DER WIJST MARC WILHELMUS MARIA·Filed 2008·Granted Jun 19, 2012·3 cites·24 claims
- 2471US7804579B2Control system, lithographic projection apparatus, method of controlling a support structure, and a computer program productASML NETHERLANDS BV·Filed 2007·Granted Sep 28, 2010·4 cites·26 claims
- 2571US7049592B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted May 23, 2006·10 cites·16 claims
- 2670US8994919B2Lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2008·Granted Mar 31, 2015·2 cites·18 claims
- 2769US9122173B2Positioning system, lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2012·Granted Sep 1, 2015·1 cites·16 claims
- 2868US8368868B2Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactlessASML NETHERLANDS BV·Filed 2009·Granted Feb 5, 2013·2 cites·14 claims
- 2968US8245824B2Combination of structure and an active damping system, and a lithographic apparatusBUTLER HANS·Filed 2008·Granted Aug 21, 2012·4 cites·20 claims
- 3067US6977713B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Dec 20, 2005·9 cites·25 claims
- 3166US7116399B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Oct 3, 2006·8 cites·16 claims
- 3265US8908144B2Lithographic apparatus and device manufacturing methodGROENEVELD ROGIER HERMAN MATHIJS·Filed 2006·Granted Dec 9, 2014·3 cites·11 claims
- 3360US9494869B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2012·Granted Nov 15, 2016·1 cites·20 claims
- 3460US8248583B2Lithographic apparatus and calibration methodVAN DEN BRINK MARINUS AART·Filed 2009·Granted Aug 21, 2012·1 cites·18 claims
- 3560US7307262B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 11, 2007·6 cites·20 claims
- 3656US7804584B2Integrated circuit manufacturing methods with patterning device position determinationASML NETHERLAND BV·Filed 2008·Granted Sep 28, 2010·0 cites·20 claims
- 3755US7471373B2Lithographic apparatus with patterning device position determinationASML NETHERLANDS BV·Filed 2004·Granted Dec 30, 2008·3 cites·23 claims
- 3854US2009027648A1Method of reducing noise in an original signal, and signal processing device thereforASML NETHERLANDS BV·Filed 2007·Application pending·0 cites
- 3952US8457385B2Measurement system and lithographic apparatus for measuring a position dependent signal of a movable objectVAN DER WIJST MARC WILHELMUS MARIA·Filed 2011·Granted Jun 4, 2013·0 cites·13 claims
- 4050US2012013883A1Method of Reducing Noise in an Original Signal, and Signal Processing Device ThereforVAN DER WIJST MARC WILHELMUS MARIA·Filed 2011·Application pending·0 cites
- 4149US8493553B2Lithographic apparatus having a feed forward pressure pulse compensation for the metrology frameBUTLER HANS·Filed 2009·Granted Jul 23, 2013·0 cites·15 claims
- 4247US2023279919A1Vibration isolator for supporting a payloadZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 4347US2011194088A1Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing MethodAMSL NETHERLANDS B V·Filed 2009·Application pending·0 cites
- 4446US10551751B2Lithography apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Feb 4, 2020·0 cites·20 claims
- 4546US10409175B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Sep 10, 2019·0 cites·20 claims
- 4645US2014293251A1Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2014·Application pending·0 cites
- 4742US8781775B2Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatusBUTLER HANS·Filed 2011·Granted Jul 15, 2014·0 cites·16 claims
- 4839US10114299B2Lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Oct 30, 2018·0 cites·19 claims
- 4936US2018101099A1Lithographic ApparatusASML NETHERLANDS BV·Filed 2016·Application pending·0 cites
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