Inventor · disambiguated record
Takahiro Yoshiki
Also filed as: YOSHIKI TAKAHIRO
2 granted patents·1 pending application·53 citations·filing 1995–2003
63Inventor score
Technology areasH01J
Top patents by PatentIndex Score
3 records- 0180US5645644APlasma processing apparatusSUMITOMO METAL IND·Filed 1995·Granted Jul 8, 1997·46 cites·7 claims
- 0242US5788798APlasma processing apparatusSUMITOMO METAL IND·Filed 1995·Granted Aug 4, 1998·7 cites·6 claims
- 0335US2003217812A1Plasma etching equipment and method for manufacturing semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →