Inventor · disambiguated record
Wendell Glenn Boyd, Jr.
Also filed as: BOYD JR WENDELL · BOYD JR WENDELL G · BOYD JR WENDELL GLENN · BOYD WENDELL G
30 granted patents·9 pending applications·480 citations·filing 2002–2025
96Inventor score
Top patents by PatentIndex Score
39 records- 0198US10648788B2Substrate distance monitoringAPPLIED MATERIALS INC·Filed 2017·Granted May 12, 2020·337 cites·20 claims
- 0298US10460916B2Real time monitoring with closed loop chucking force controlAPPLIED MATERIALS INC·Filed 2018·Granted Oct 29, 2019·45 cites·11 claims
- 0396US10020218B2Substrate support assembly with deposited surface featuresAPPLIED MATERIALS INC·Filed 2015·Granted Jul 10, 2018·18 cites·19 claims
- 0495US9196514B2Electrostatic chuck with variable pixilated heatingPARKHE VIJAY D·Filed 2013·Granted Nov 24, 2015·28 cites·20 claims
- 0593US10679885B2Substrate support assembly with deposited surface featuresAPPLIED MATERIALS INC·Filed 2018·Granted Jun 9, 2020·7 cites·20 claims
- 0691US11769683B2Chamber component with protective ceramic coating containing yttrium, aluminum and oxygenAPPLIED MATERIALS INC·Filed 2022·Granted Sep 26, 2023·1 cites·20 claims
- 0789US11114326B2Substrate chucking and dechucking methodsAPPLIED MATERIALS INC·Filed 2019·Granted Sep 7, 2021·6 cites·12 claims
- 0888US10654147B2Polishing of electrostatic substrate support geometriesAPPLIED MATERIALS INC·Filed 2018·Granted May 19, 2020·5 cites·17 claims
- 0987US10847402B2Bond protection around porous plugsAPPLIED MATERIALS INC·Filed 2018·Granted Nov 24, 2020·4 cites·18 claims
- 1086US12424413B2Substrate support with real time force and film stress controlAPPLIED MATERIALS INC·Filed 2024·Granted Sep 23, 2025·0 cites·17 claims
- 1185US11699611B2Forming mesas on an electrostatic chuckAPPLIED MATERIALS INC·Filed 2021·Granted Jul 11, 2023·1 cites·29 claims
- 1283US11915913B2Substrate support with real time force and film stress controlAPPLIED MATERIALS INC·Filed 2023·Granted Feb 27, 2024·0 cites·20 claims
- 1382US9558981B2Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methodsAPPLIED MATERIALS INC·Filed 2014·Granted Jan 31, 2017·4 cites·15 claims
- 1479US9622375B2Electrostatic chuck with external flow adjustments for improved temperature distributionBUSCHE MATTHEW J·Filed 2013·Granted Apr 11, 2017·5 cites·13 claims
- 1578US12074052B2Forming mesas on an electrostatic chuckAPPLIED MATERIALS INC·Filed 2023·Granted Aug 27, 2024·0 cites·20 claims
- 1678US9001489B2Electrostatic chuck AlN dielectric repairBOYD JR WENDELL G·Filed 2012·Granted Apr 7, 2015·7 cites·16 claims
- 1777US11114327B2ESC substrate support with chucking force controlAPPLIED MATERIALS INC·Filed 2018·Granted Sep 7, 2021·2 cites·20 claims
- 1876US10403534B2Pixilated cooling, temperature controlled substrate support assemblyAPPLIED MATERIALS INC·Filed 2014·Granted Sep 3, 2019·3 cites·20 claims
- 1976US9520315B2Electrostatic chuck with internal flow adjustments for improved temperature distributionPARKHE VIJAY D·Filed 2013·Granted Dec 13, 2016·3 cites·20 claims
- 2075US2024420986A1Forming mesas on an electrostatic chuckAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2174US11676802B2Substrate support with real time force and film stress controlAPPLIED MATERIALS INC·Filed 2020·Granted Jun 13, 2023·0 cites·11 claims
- 2272US11476146B2Substrate support assembly with deposited surface featuresAPPLIED MATERIALS INC·Filed 2020·Granted Oct 18, 2022·0 cites·20 claims
- 2372US10121688B2Electrostatic chuck with external flow adjustments for improved temperature distributionAPPLIED MATERIALS INC·Filed 2017·Granted Nov 6, 2018·1 cites·20 claims
- 2472US9698041B2Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methodsAPPLIED MATERIALS INC·Filed 2014·Granted Jul 4, 2017·2 cites·20 claims
- 2572US2025293072A1Electrostatic chuck with improved temperature controlAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2669US11648639B2Polishing jig assembly for a new or refurbished electrostatic chuckAPPLIED MATERIALS INC·Filed 2021·Granted May 16, 2023·0 cites·16 claims
- 2766US10736182B2Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusersAPPLIED MATERIALS INC·Filed 2015·Granted Aug 4, 2020·1 cites·9 claims
- 2862US12322633B2Electrostatic chuck with improved temperature controlAPPLIED MATERIALS INC·Filed 2021·Granted Jun 3, 2025·0 cites·15 claims
- 2955US9875923B2Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methodsAPPLIED MATERIALS INC·Filed 2016·Granted Jan 23, 2018·0 cites·19 claims
- 3050US11054317B2Method and apparatus for direct measurement of chucking force on an electrostatic chuckAPPLIED MATERIALS INC·Filed 2019·Granted Jul 6, 2021·0 cites·17 claims
- 3150US2010108641A1Lavacoat pre-clean and pre-heatAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 3248US2012255635A1Method and apparatus for refurbishing gas distribution plate surfacesBANDA SUMANTH·Filed 2012·Application pending·0 cites
- 3347US11854911B2Methods, systems, and apparatus for conducting chucking operations using an adjusted chucking voltage if a process shift occursAPPLIED MATERIALS INC·Filed 2021·Granted Dec 26, 2023·0 cites·12 claims
- 3443US2008180873A1Securing a substrate to an electrostatic chuckAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 3542US9986598B2Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methodsAPPLIED MATERIALS INC·Filed 2015·Granted May 29, 2018·0 cites·20 claims
- 3642US2005045106A1Electrostatic chuck having a low level of particle generation and method of fabricating sameFiled 2004·Application pending·0 cites
- 3740US2004055709A1Electrostatic chuck having a low level of particle generation and method of fabricating sameAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 3838US2019080949A1Soft chucking and dechucking for electrostatic chucking substrate supportsAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 3936US2012258280A1Extended life textured chamber components and method for fabricating sameJACKSON MICHAEL·Filed 2012·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →