Inventor · disambiguated record
Emily Shu
Also filed as: PETRUCCO LOUIS JACOB · SHU EMILY · SHU EMILY Y · SHU EMILY YIXIE
22 granted patents·1 pending application·476 citations·filing 1992–2015
96Inventor score
Files withGEN ELECTRIC11INTEL CORP4SEMICONDUCTOR MFG INT CORP2SEMICONDUCTOR MFG INT SHANGHAI2SEMICONDUCTOR MFG INT SHANGHAI CORP2
Top patents by PatentIndex Score
23 records- 0199US5544478AOptical sensing of combustion dynamicsGEN ELECTRIC·Filed 1994·Granted Aug 13, 1996·144 cites·20 claims
- 0287US6599028B1Fiber optic sensors for gas turbine controlGEN ELECTRIC·Filed 1999·Granted Jul 29, 2003·63 cites·8 claims
- 0380US9665017B2Method for reducing contamination in extreme ultraviolet lithography light sourceSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2015·Granted May 30, 2017·2 cites·10 claims
- 0480US6978074B2Fiber optic sensors for gas turbine controlGEN ELECTRIC·Filed 2003·Granted Dec 20, 2005·22 cites·11 claims
- 0580US6842227B2Fusion attachment of rigid pellicles and/or framesINTEL CORP·Filed 2003·Granted Jan 11, 2005·15 cites·24 claims
- 0680US5290398ASynthesis of tapers for fiber optic sensorsGEN ELECTRIC·Filed 1992·Granted Mar 1, 1994·48 cites·16 claims
- 0779US6842228B2Fusion attachment of rigid pellicles and/or framesINTEL CORP·Filed 2003·Granted Jan 11, 2005·13 cites·26 claims
- 0879US5569911AFiber optic system for remote fluorescent sensing using excitation and return fibersGEN ELECTRIC·Filed 1996·Granted Oct 29, 1996·42 cites·18 claims
- 0978US5978525AFiber optic sensors for gas turbine controlGEN ELECTRIC·Filed 1997·Granted Nov 2, 1999·46 cites·12 claims
- 1074US5608515ADouble window for protecting optical sensors from hazardous environmentsGEN ELECTRIC·Filed 1995·Granted Mar 4, 1997·48 cites·15 claims
- 1170US8929051B2Apparatus and method for holding a waferSHU EMILY·Filed 2012·Granted Jan 6, 2015·3 cites·15 claims
- 1269US9176400B2System and method for reducing contamination in extreme ultraviolet lithography light sourceSEMICONDUCTOR MFG INT SHANGHAI·Filed 2014·Granted Nov 3, 2015·2 cites·15 claims
- 1366US9054021B2Transistors and fabrication methodSEMICONDUCTOR MFG INT CORP·Filed 2013·Granted Jun 9, 2015·2 cites·20 claims
- 1466US9049774B2EUVL light source system and methodSEMICONDUCTOR MFG INT SHANGHAI·Filed 2014·Granted Jun 2, 2015·2 cites·17 claims
- 1564US8917489B2Apparatus and method for holding a waferSEMICONDUCTOR MFG INT CORP·Filed 2012·Granted Dec 23, 2014·1 cites·19 claims
- 1663US6834549B2Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor arrayINTEL CORP·Filed 2003·Granted Dec 28, 2004·8 cites·36 claims
- 1753US7759024B2Controlling shape of a reticle with low friction film coating at backsideINTEL CORP·Filed 2007·Granted Jul 20, 2010·0 cites·18 claims
- 1844US6486487B2Apparatus and method for measuring and selectively adjusting a clearanceGEN ELECTRIC·Filed 2001·Granted Nov 26, 2002·7 cites·6 claims
- 1943US2004200572A1Assembling pellicle frames and photomasksFiled 2003·Application pending·0 cites
- 2041US9706632B2EUV light source and exposure apparatusSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2015·Granted Jul 11, 2017·0 cites·20 claims
- 2134US5580741AChemiluminescence immunoassay for chlorinated aromatic compound detectionGEN ELECTRIC·Filed 1994·Granted Dec 3, 1996·4 cites·32 claims
- 2231US6279400B1Apparatus and method for measuring and selectively adjusting a clearanceGEN ELECTRIC·Filed 1999·Granted Aug 28, 2001·4 cites·19 claims
- 2329US5936718AMethod for detecting fiber misalignment in composite manufacturingGEN ELECTRIC·Filed 1998·Granted Aug 10, 1999·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →