Inventor · disambiguated record
Toshimitsu Uehigashi
Also filed as: UEHIGASHI TOSHIMITSU
3 granted patents·1 pending application·21 citations·filing 2000–2020
62Inventor score
Top patents by PatentIndex Score
4 records- 0176US6413392B1Sputtering deviceULVAC CORP·Filed 2000·Granted Jul 2, 2002·19 cites·14 claims
- 0263US8669191B2Method for forming Ni filmUEHIGASHI TOSHIMITSU·Filed 2012·Granted Mar 11, 2014·2 cites·11 claims
- 0340US2022056571A1Film Forming MethodULVAC INC·Filed 2020·Application pending·0 cites
- 0435US8815737B2Method for forming NiSi film, method for forming silicide film, method for forming metal film for use in silicide-annealing, apparatus for vacuum processing and film-forming apparatusHIGUCHI YASUSHI·Filed 2012·Granted Aug 26, 2014·0 cites·7 claims
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