Inventor · disambiguated record
Kaoru Umemura
Also filed as: UMEMURA KAORU
81 granted patents·8 pending applications·2,585 citations·filing 1984–2016
99Inventor score
Files withHITACHI LTD52HITACHI HIGH TECH CORP19HITACHI GLOBAL STORAGE TECH4SHICHI HIROYASU3TOKUDA MITSUO2
Top patents by PatentIndex Score
89 records- 0199US8779400B2Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sampleHITACHI HIGH TECH CORP·Filed 2013·Granted Jul 15, 2014·91 cites·12 claims
- 0299US6664552B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2001·Granted Dec 16, 2003·139 cites·2 claims
- 0398US7138628B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2006·Granted Nov 21, 2006·35 cites·24 claims
- 0498US6734687B1Apparatus for detecting defect in device and method of detecting defectHITACHI LTD·Filed 2000·Granted May 11, 2004·134 cites·10 claims
- 0598US6538254B1Method and apparatus for sample fabricationHITACHI LTD·Filed 1998·Granted Mar 25, 2003·315 cites·19 claims
- 0697US7071475B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2004·Granted Jul 4, 2006·61 cites·8 claims
- 0797US6828566B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2003·Granted Dec 7, 2004·62 cites·24 claims
- 0897US6781125B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2001·Granted Aug 24, 2004·114 cites·14 claims
- 0996US7205560B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2005·Granted Apr 17, 2007·32 cites·27 claims
- 1096US7205554B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2005·Granted Apr 17, 2007·34 cites·5 claims
- 1196US7176458B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2006·Granted Feb 13, 2007·18 cites·13 claims
- 1296US6717156B2Beam as well as method and equipment for specimen fabricationHITACHI LTD·Filed 2002·Granted Apr 6, 2004·109 cites·19 claims
- 1396US5825035AProcessing method and apparatus using focused ion beam generating meansHITACHI LTD·Filed 1996·Granted Oct 20, 1998·140 cites·16 claims
- 1495US7700931B2Ion beam processing apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Apr 20, 2010·20 cites·9 claims
- 1595US7550750B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2007·Granted Jun 23, 2009·26 cites·32 claims
- 1695US7525108B2Focused ion beam apparatus for specimen fabricationHITACHI LTD·Filed 2007·Granted Apr 28, 2009·16 cites·30 claims
- 1795US7397050B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2007·Granted Jul 8, 2008·16 cites·25 claims
- 1895US7397052B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2007·Granted Jul 8, 2008·16 cites·11 claims
- 1995US6927391B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2004·Granted Aug 9, 2005·69 cites·4 claims
- 2095US6797954B2Patterned wafer inspection method and apparatus thereforHITACHI LTD·Filed 2003·Granted Sep 28, 2004·42 cites·7 claims
- 2195US5504340AProcess method and apparatus using focused ion beam generating meansHITACHI LTD·Filed 1994·Granted Apr 2, 1996·94 cites·37 claims
- 2294US7897936B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2007·Granted Mar 1, 2011·15 cites·15 claims
- 2394US7470918B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2007·Granted Dec 30, 2008·22 cites·15 claims
- 2494US7465945B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2007·Granted Dec 16, 2008·20 cites·7 claims
- 2593US8481980B2Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sampleSHICHI HIROYASU·Filed 2008·Granted Jul 9, 2013·17 cites·11 claims
- 2693US5583344AProcess method and apparatus using focused ion beam generating meansHITACHI LTD·Filed 1996·Granted Dec 10, 1996·73 cites·6 claims
- 2793US4774414ALiquid metal ion sourceHITACHI LTD·Filed 1986·Granted Sep 27, 1988·56 cites·2 claims
- 2892US7888639B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2007·Granted Feb 15, 2011·14 cites·2 claims
- 2992US7397051B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2007·Granted Jul 8, 2008·8 cites·9 claims
- 3092US6794663B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2003·Granted Sep 21, 2004·33 cites·9 claims
- 3192US6650491B2System and method for setting a read/write offset and for recovering from data read errorsIBM·Filed 2001·Granted Nov 18, 2003·47 cites·15 claims
- 3291US8569719B2Method and apparatus for specimen fabricationTOMIMATSU SATOSHI·Filed 2011·Granted Oct 29, 2013·6 cites·18 claims
- 3391US7733589B2Alternate cylinder table to improve adjacent track interference problemHITACHI GLOBAL STORAGE TECH·Filed 2005·Granted Jun 8, 2010·13 cites·21 claims
- 3491US7420181B2Liquid metal ion gunHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 2, 2008·10 cites·13 claims
- 3591US7368729B2Method, apparatus and system for specimen fabrication by using an ion beamHITACHI HIGH TECH CORP·Filed 2006·Granted May 6, 2008·12 cites·13 claims
- 3691US4697086AApparatus for implanting ion microbeamHITACHI LTD·Filed 1984·Granted Sep 29, 1987·35 cites·2 claims
- 3790US7268356B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2004·Granted Sep 11, 2007·28 cites·13 claims
- 3890US6979823B2Patterned wafer inspection method and apparatus thereforHITACHI LTD·Filed 2004·Granted Dec 27, 2005·21 cites·9 claims
- 3989US8222618B2Method and apparatus for processing a microsampleTOKUDA MITSUO·Filed 2011·Granted Jul 17, 2012·9 cites·18 claims
- 4089US6750451B2Observation apparatus and observation method using an electron beamHITACHI LTD·Filed 2002·Granted Jun 15, 2004·32 cites·5 claims
- 4189US4755685AIon micro beam apparatusHITACHI LTD·Filed 1986·Granted Jul 5, 1988·41 cites·7 claims
- 4288US8618520B2Method and apparatus for processing a micro sampleTOKUDA MITSUO·Filed 2012·Granted Dec 31, 2013·7 cites·24 claims
- 4388US7777183B2Charge particle beam system, sample processing method, and semiconductor inspection systemHITACHI HIGH TECH CORP·Filed 2007·Granted Aug 17, 2010·13 cites·16 claims
- 4488US7592606B2Manufacturing equipment using ION beam or electron beamHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 22, 2009·11 cites·22 claims
- 4588US7211805B2Liquid metal ion gunHITACHI HIGH TECH CORP·Filed 2005·Granted May 1, 2007·8 cites·3 claims
- 4688US6583426B1Projection ion beam machining apparatusHITACHI LTD·Filed 1997·Granted Jun 24, 2003·56 cites·12 claims
- 4787US7242015B2Patterned wafer inspection method and apparatus thereforHITACHI LTD·Filed 2005·Granted Jul 10, 2007·6 cites·21 claims
- 4886US8405053B2Method and apparatus for specimen fabricationTOMIMATSU SATOSHI·Filed 2011·Granted Mar 26, 2013·4 cites·3 claims
- 4986US7999240B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2008·Granted Aug 16, 2011·4 cites·14 claims
- 5086US7189982B2Focused ion beam apparatus and apertureHITACHI HIGH TECH CORP·Filed 2005·Granted Mar 13, 2007·8 cites·10 claims
Showing the top 50 of 89 patent records by PatentIndex Score.
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