Inventor · disambiguated record
Seunghun Seo
Also filed as: SEO SEUNGHUN
1 granted patent·1 pending application·0 citations·filing 2022–2024
5Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0155US2024395583A1Method for generating reference status data for monitoring status of chamber, method for monitoring status of chamber, and apparatus for monitoring status of chamberAETHER INC·Filed 2024·Application pending·0 cites
- 0246US12424422B2Plasma processing apparatus and semiconductor device manufacturing methodSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Sep 23, 2025·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →