Inventor · disambiguated record
Layton Hale
Also filed as: HALE LAYTON · HALE LAYTON C · HALE LAYTON CARTER
16 granted patents·2 pending applications·365 citations·filing 1995–2023
93Inventor score
Top patents by PatentIndex Score
18 records- 0194US11878185B2High bandwidth binary multi-leaf collimator designREFLEXION MEDICAL INC·Filed 2021·Granted Jan 23, 2024·2 cites·28 claims
- 0293US5986827APrecision tip-tilt-piston actuator that provides exact constraintUNIV CALIFORNIA·Filed 1998·Granted Nov 16, 1999·145 cites·19 claims
- 0392US9544984B2System and method for generation of extreme ultraviolet lightKLA TENCOR CORP·Filed 2014·Granted Jan 10, 2017·10 cites·25 claims
- 0491US8963110B2Continuous generation of extreme ultraviolet lightKLA TENCOR CORP·Filed 2014·Granted Feb 24, 2015·12 cites·30 claims
- 0589US10500416B2High bandwidth binary multi-leaf collimator designREFLEXION MEDICAL INC·Filed 2016·Granted Dec 10, 2019·7 cites·30 claims
- 0687US6325351B1Highly damped kinematic coupling for precision instrumentsUNIV CALIFORNIA·Filed 2000·Granted Dec 4, 2001·46 cites·16 claims
- 0784US11285340B2High bandwidth binary multi-leaf collimator designREFLEXION MEDICAL INC·Filed 2019·Granted Mar 29, 2022·4 cites·14 claims
- 0884US6147818AProjection optics boxUNIV CALIFORNIA·Filed 1998·Granted Nov 14, 2000·58 cites·19 claims
- 0979US6065898AThree tooth kinematic couplingUNIV CALIFORNIA·Filed 1995·Granted May 23, 2000·40 cites·15 claims
- 1078US2024198136A1High bandwidth binary multi-leaf collimator designREFLEXION MEDICAL INC·Filed 2023·Application pending·0 cites
- 1174US5642956AAdjustable link for kinematic mounting systemsUNIV CALIFORNIA·Filed 1996·Granted Jul 1, 1997·33 cites·15 claims
- 1270US9298106B1Wafer stage with reciprocating wafer stage actuation controlUMMETHALA UPENDRA·Filed 2012·Granted Mar 29, 2016·3 cites·26 claims
- 1368US10880979B2Droplet generation for a laser produced plasma light sourceKLA TENCOR CORP·Filed 2016·Granted Dec 29, 2020·1 cites·14 claims
- 1467US11343899B2Droplet generation for a laser produced plasma light sourceKLA CORP·Filed 2020·Granted May 24, 2022·0 cites·19 claims
- 1543US8724115B2Linear stage and metrology architecture for reflective electron beam lithographyKLA TENCOR CORP·Filed 2013·Granted May 13, 2014·0 cites·30 claims
- 1641US2013105108A1Heat Removal From Substrates In VacuumKLA TENCOR CORP·Filed 2012·Application pending·0 cites
- 1740US9690213B2Linear Stage for reflective electron beam lithographyUMMETHALA UPENDRA·Filed 2012·Granted Jun 27, 2017·0 cites·63 claims
- 1831US6206966B1Pedestal substrate for coated opticsUNIV CALIFORNIA·Filed 1998·Granted Mar 27, 2001·4 cites·22 claims
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