Inventor · disambiguated record
Gerd Scheuring
Also filed as: SCHEURING GERD
2 granted patents·4 pending applications·0 citations·filing 2004–2009
23Inventor score
Top patents by PatentIndex Score
6 records- 0136US2009316981A1Method and device for inspecting a disk-shaped objectVISTEC SEMICONDUCTOR SYS GMBH·Filed 2009·Application pending·0 cites
- 0230US7375792B2Apparatus for measuring feature widths on masks for the semiconductor industryLEICA MICROSYSTEMS·Filed 2004·Granted May 20, 2008·0 cites·22 claims
- 0328US2009066970A1Arrangement and method for improving the measurement accuracy in the nm range for optical systemsMUETEC AUTOMATISIERTE MIKROSKO·Filed 2008·Application pending·0 cites
- 0427US2008259327A1Device for Inspecting a Microscopic ComponentVISTEC SEMICONDUCTOR SYS GMBH·Filed 2005·Application pending·0 cites
- 0527US2007206279A1Device for inspecting a microscopic component by means of an immersion objectiveVISTEC SEMICONDUCTOR SYS GMBH·Filed 2005·Application pending·0 cites
- 0618US7460962B2Method for an automatic optical measuring of an OPC structureMUETEC AUTOMATISIERTE MIKROSKO·Filed 2004·Granted Dec 2, 2008·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →