Inventor · disambiguated record
Hilton F. Glavish
Also filed as: GLAVISH HILTON · GLAVISH HILTON F · GLAVISH HILTON FRANK
29 granted patents·1 pending application·1,548 citations·filing 1988–2015
98Inventor score
Files withAPPLIED MATERIALS INC3EBARA SOLAR INC3GLAVISH HILTON F3NISSIN ELECTRIC CO LTD3OESTERR INVESTITIONSKREDIT3
Top patents by PatentIndex Score
30 records- 0199US5483077ASystem and method for magnetic scanning, accelerating, and implanting of an ion beamNISSIN ELECTRIC CO LTD·Filed 1995·Granted Jan 9, 1996·197 cites·16 claims
- 0298US5311028ASystem and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ionsNISSIN ELECTRIC CO LTD·Filed 1992·Granted May 10, 1994·147 cites·35 claims
- 0397US4985634AIon beam lithographyOESTERR INVESTITIONSKREDIT·Filed 1988·Granted Jan 15, 1991·126 cites·51 claims
- 0496US7989784B2Ion implantation apparatus and a methodTWIN CREEKS TECHNOLOGIES INC·Filed 2009·Granted Aug 2, 2011·30 cites·27 claims
- 0596US5132544ASystem for irradiating a surface with atomic and molecular ions using two dimensional magnetic scanningNISSIN ELECTRIC CO LTD·Filed 1990·Granted Jul 21, 1992·108 cites·94 claims
- 0695US6639227B1Apparatus and method for charged particle filtering and ion implantationAPPLIED MATERIALS INC·Filed 2000·Granted Oct 28, 2003·81 cites·17 claims
- 0795US5504341AProducing RF electric fields suitable for accelerating atomic and molecular ions in an ion implantation systemZIMEC CONSULTING INC·Filed 1995·Granted Apr 2, 1996·143 cites·19 claims
- 0895US5393984AMagnetic deflection system for ion beam implantersNISSIN ELECTRIC CO INC·Filed 1993·Granted Feb 28, 1995·113 cites·40 claims
- 0994US7939812B2Ion source assembly for ion implantation apparatus and a method of generating ions thereinTWIN CREEKS TECHNOLOGIES INC·Filed 2009·Granted May 10, 2011·23 cites·16 claims
- 1094US6423976B1Ion implanter and a method of implanting ionsAPPLIED MATERIALS INC·Filed 1999·Granted Jul 23, 2002·97 cites·29 claims
- 1194US4967088AMethod and apparatus for image alignment in ion lithographyOESTERR INVESTITIONSKREDIT·Filed 1988·Granted Oct 30, 1990·99 cites·49 claims
- 1293US8110820B2Ion beam apparatus and method for ion implantationGLAVISH HILTON F·Filed 2007·Granted Feb 7, 2012·23 cites·50 claims
- 1392US8044374B2Ion implantation apparatusTWIN CREEKS TECHNOLOGIES INC·Filed 2009·Granted Oct 25, 2011·25 cites·27 claims
- 1492US5481116AMagnetic system and method for uniformly scanning heavy ion beamsIBIS TECHNOLOGY CORP·Filed 1994·Granted Jan 2, 1996·89 cites·37 claims
- 1590US5672879ASystem and method for producing superimposed static and time-varying magnetic fieldsFiled 1995·Granted Sep 30, 1997·64 cites·28 claims
- 1689US8436326B2Ion beam apparatus and method employing magnetic scanningGLAVISH HILTON F·Filed 2010·Granted May 7, 2013·9 cites·5 claims
- 1788US4916322AArrangement for stabilizing an irradiated maskOESTERR INVESTITIONSKREDIT·Filed 1988·Granted Apr 10, 1990·53 cites·26 claims
- 1886US7851773B2Ion beam apparatus and method employing magnetic scanningSEMIQUIP INC·Filed 2007·Granted Dec 14, 2010·13 cites·40 claims
- 1980US6525327B1Ion implanter and beam stop thereforAPPLIED MATERIALS INC·Filed 2000·Granted Feb 25, 2003·24 cites·27 claims
- 2075US5907158ABroad range ion implanterEBARA CORP·Filed 1997·Granted May 25, 1999·30 cites·8 claims
- 2173US5438203ASystem and method for unipolar magnetic scanning of heavy ion beamsNISSIN ELECTRIC COMPANY·Filed 1994·Granted Aug 1, 1995·33 cites·22 claims
- 2264US9728371B2Ion beam scanner for an ion implanterNISSIN ION EQUIPMENT CO LTD·Filed 2015·Granted Aug 8, 2017·1 cites·21 claims
- 2364US7078714B2Ion implanting apparatusNISSIN ION EQUIPMENT CO LTD·Filed 2004·Granted Jul 18, 2006·12 cites·18 claims
- 2463US8633458B2Ion implant apparatus and a method of implanting ionsSMICK THEODORE·Filed 2011·Granted Jan 21, 2014·1 cites·20 claims
- 2557US6673148B2Method of using a magnetic field furnace to manufacture semiconductor substratesEBARA SOLAR INC·Filed 2002·Granted Jan 6, 2004·6 cites·20 claims
- 2656US8759803B2Ion implant apparatus and a method of implanting ionsGTAT CORP·Filed 2014·Granted Jun 24, 2014·0 cites·20 claims
- 2751US8723135B2Ion beam bending magnet for a ribbon-shaped ion beamGLAVISH HILTON FRANK·Filed 2012·Granted May 13, 2014·1 cites·21 claims
- 2841US6669776B2Magnetic field furnace and a method of using the same to manufacture semiconductor substratesEBARA SOLAR INC·Filed 2002·Granted Dec 30, 2003·0 cites·7 claims
- 2938US2009250603A1Magnetic analyzer apparatus and method for ion implantationGLAVISH HILTON F·Filed 2007·Application pending·0 cites
- 3036US6482261B2Magnetic field furnaceEBARA SOLAR INC·Filed 2000·Granted Nov 19, 2002·0 cites·17 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →