Inventor · disambiguated record
Takahiro Kawazu
Also filed as: KAWAZU Takahiro
5 granted patents·1 pending application·4 citations·filing 2014–2022
66Inventor score
Top patents by PatentIndex Score
6 records- 0179US11295966B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Apr 5, 2022·2 cites·5 claims
- 0277US11869780B2Substrate liquid processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jan 9, 2024·2 cites·4 claims
- 0364US11842904B2Control device and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Granted Dec 12, 2023·0 cites·9 claims
- 0444US2024231946A9Process allocation control device, process allocation control method, and recording medium storing process allocation control programNEC CORP·Filed 2021·Application pending·0 cites
- 0542US9887092B2Etching method, etching apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Feb 6, 2018·0 cites·13 claims
- 0634US10985035B2Substrate liquid processing apparatus, substrate liquid processing method and computer readable recording medium having substrate liquid processing program recorded thereinTOKYO ELECTRON LTD·Filed 2015·Granted Apr 20, 2021·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →