Inventor · disambiguated record
Vahan Senekerimyan
Also filed as: SENEKERIMYAN VAHAN · SENEKERIMYAN VAHAN A
13 granted patents·91 citations·filing 2009–2022
89Inventor score
Top patents by PatentIndex Score
13 records- 0195US8809823B1System and method for controlling droplet timing and steering in an LPP EUV light sourceCymer LLC·Filed 2013·Granted Aug 19, 2014·22 cites·14 claims
- 0295US8000212B2Metrology for extreme ultraviolet light sourceCYMER INC·Filed 2009·Granted Aug 16, 2011·25 cites·31 claims
- 0394US9778022B1Determining moving properties of a target in an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2016·Granted Oct 3, 2017·22 cites·34 claims
- 0492US9241395B2System and method for controlling droplet timing in an LPP EUV light sourceASML NETHERLANDS BV·Filed 2013·Granted Jan 19, 2016·16 cites·14 claims
- 0582US11125967B2System and method for calibrating variable focal length lens system using calibration object with planar tilted pattern surfaceMITUTOYO CORP·Filed 2018·Granted Sep 21, 2021·4 cites·23 claims
- 0681US10605588B2Determining moving properties of a target in an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2019·Granted Mar 31, 2020·2 cites·18 claims
- 0766US10794683B2Determining moving properties of a target in an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2020·Granted Oct 6, 2020·0 cites·20 claims
- 0865US12352704B2Metrology system for measuring edge of circular workpieceMITUTOYO CORP·Filed 2022·Granted Jul 8, 2025·0 cites·20 claims
- 0960US10429173B2Determining moving properties of a target in an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2017·Granted Oct 1, 2019·0 cites·23 claims
- 1056US10210963B2Method of improving measurement of energy of extreme ultraviolet radiation generated in a chamberASML NETHERLANDS BV·Filed 2016·Granted Feb 19, 2019·0 cites·12 claims
- 1154US9546901B2Minimizing grazing incidence reflections for reliable EUV power measurements having a light source comprising plural tubes with centerlines disposed between a radiation region and corresponding photodetector modulesASML NETHERLANDS BV·Filed 2014·Granted Jan 17, 2017·0 cites·21 claims
- 1248US9341752B2Viewport protector for an extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2012·Granted May 17, 2016·0 cites·28 claims
- 1345US10812701B2High-speed tag lens assisted 3D metrology and extended depth-of-field imagingMITUTOYO CORP·Filed 2018·Granted Oct 20, 2020·0 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →