Inventor · disambiguated record
Hideyuki Kazumi
Also filed as: KAZUMI HIDEYUKI
74 granted patents·4 pending applications·515 citations·filing 1997–2022
99Inventor score
Top patents by PatentIndex Score
78 records- 0197US6388382B1Plasma processing apparatus and methodHITACHI LTD·Filed 2000·Granted May 14, 2002·78 cites·40 claims
- 0294US9659744B2Charged particle beam apparatus and inspection method using the sameHITACHI HIGH TECH CORP·Filed 2015·Granted May 23, 2017·7 cites·13 claims
- 0394US6833051B2Plasma processing apparatus and methodHITACHI LTD·Filed 2002·Granted Dec 21, 2004·33 cites·13 claims
- 0492US9697987B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2014·Granted Jul 4, 2017·9 cites·11 claims
- 0592US6756737B2Plasma processing apparatus and methodHITACHI LTD·Filed 2002·Granted Jun 29, 2004·37 cites·4 claims
- 0692US6180019B1Plasma processing apparatus and methodHITACHI LTD·Filed 1997·Granted Jan 30, 2001·51 cites·2 claims
- 0791US11011348B2Scanning electron microscope and sample observation method using scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2017·Granted May 18, 2021·8 cites·12 claims
- 0891US10720306B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2019·Granted Jul 21, 2020·4 cites·12 claims
- 0991US6499424B2Plasma processing apparatus and methodHITACHI LTD·Filed 2001·Granted Dec 31, 2002·23 cites·12 claims
- 1090US10249474B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2017·Granted Apr 2, 2019·4 cites·10 claims
- 1188US10037866B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2016·Granted Jul 31, 2018·5 cites·14 claims
- 1288US9236220B2Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscopeHITACHI HIGH TECH CORP·Filed 2013·Granted Jan 12, 2016·8 cites·17 claims
- 1387US9704687B2Charged particle beam application deviceHITACHI HIGH TECH CORP·Filed 2015·Granted Jul 11, 2017·5 cites·9 claims
- 1487US8153966B2Electrode unit and charged particle beam deviceARAI NORIAKI·Filed 2009·Granted Apr 10, 2012·11 cites·17 claims
- 1586US8648300B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2013·Granted Feb 11, 2014·7 cites·12 claims
- 1686US8263934B2Method for detecting information of an electric potential on a sample and charged particle beam apparatusYAMAZAKI MINORU·Filed 2007·Granted Sep 11, 2012·7 cites·18 claims
- 1785US9997326B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2016·Granted Jun 12, 2018·4 cites·7 claims
- 1884US9336984B2Charged particle beam device and measuring method using the sameHITACHI HIGH TECH CORP·Filed 2014·Granted May 10, 2016·6 cites·9 claims
- 1984US8080790B2Scanning electron microscopeYAMAZAKI MINORU·Filed 2009·Granted Dec 20, 2011·7 cites·20 claims
- 2084US7989768B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2008·Granted Aug 2, 2011·6 cites·6 claims
- 2183US7763852B2Scanning electron microscope having time constant measurement capabilityHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 27, 2010·8 cites·12 claims
- 2282US10304654B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2016·Granted May 28, 2019·3 cites·15 claims
- 2382US8907279B2Electron microscope and image capturing method using electron beamTSUNO NATSUKI·Filed 2012·Granted Dec 9, 2014·8 cites·19 claims
- 2482US6846363B2Plasma processing apparatus and methodHITACHI LTD·Filed 2002·Granted Jan 25, 2005·11 cites·6 claims
- 2581US6481370B2Plasma processsing apparatusHITACHI LTD·Filed 2000·Granted Nov 19, 2002·10 cites·9 claims
- 2680US11211226B2Pattern cross-sectional shape estimation system and programHITACHI HIGH TECH CORP·Filed 2020·Granted Dec 28, 2021·1 cites·5 claims
- 2780US8729491B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2013·Granted May 20, 2014·4 cites·7 claims
- 2880US6677244B2Specimen surface processing methodHITACHI LTD·Filed 2002·Granted Jan 13, 2004·18 cites·4 claims
- 2979US11133147B2Charged particle ray device and cross-sectional shape estimation programHITACHI HIGH TECH CORP·Filed 2018·Granted Sep 28, 2021·2 cites·12 claims
- 3079US9786468B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2014·Granted Oct 10, 2017·4 cites·12 claims
- 3179US9653256B2Charged particle-beam deviceHITACHI HIGH TECH CORP·Filed 2014·Granted May 16, 2017·4 cites·12 claims
- 3279US8274048B2Scanning electron microscope having time constant measurement capabilityIKEGAMI AKIRA·Filed 2010·Granted Sep 25, 2012·5 cites·5 claims
- 3378US11798780B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2021·Granted Oct 24, 2023·0 cites·5 claims
- 3478US9472376B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2013·Granted Oct 18, 2016·4 cites·10 claims
- 3578US9019362B2Charged particle beam device and a method of improving image quality of the sameBAI JIE·Filed 2010·Granted Apr 28, 2015·4 cites·14 claims
- 3677US9640366B2Electron beam irradiation method and scanning electron microscopeYOKOSUKA TOSHIYUKI·Filed 2011·Granted May 2, 2017·5 cites·10 claims
- 3777US9520266B2Pattern critical dimension measurement equipment and method for measuring pattern critical dimensionHITACHI HIGH TECH CORP·Filed 2014·Granted Dec 13, 2016·4 cites·20 claims
- 3877US9159529B2Scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2013·Granted Oct 13, 2015·3 cites·11 claims
- 3974US10541103B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2014·Granted Jan 21, 2020·3 cites·19 claims
- 4074US6919274B2LSI device etching method and apparatus thereofHITACHI HIGH TECH CORP·Filed 2004·Granted Jul 19, 2005·18 cites·13 claims
- 4173US11239052B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2020·Granted Feb 1, 2022·0 cites·3 claims
- 4271US8216420B2Plasma processing apparatusKAZUMI HIDEYUKI·Filed 2006·Granted Jul 10, 2012·4 cites·5 claims
- 4370US10229811B2Charged particle beam inclination correction method and charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2014·Granted Mar 12, 2019·2 cites·15 claims
- 4470US10121634B2Charged particle beam device and charged particle beam measurement methodHITACHI HIGH TECH CORP·Filed 2014·Granted Nov 6, 2018·2 cites·14 claims
- 4566US6388624B1Parallel-planar plasma processing apparatusHITACHI LTD·Filed 2001·Granted May 14, 2002·10 cites·8 claims
- 4664US10446361B2Aberration correction method, aberration correction system, and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2015·Granted Oct 15, 2019·1 cites·15 claims
- 4761US8309923B2Sample observing method and scanning electron microscopeOMORI SEIKO·Filed 2010·Granted Nov 13, 2012·2 cites·11 claims
- 4860US12400383B2Training method for learning apparatus, and image generation systemHITACHI HIGH TECH CORP·Filed 2022·Granted Aug 26, 2025·0 cites·17 claims
- 4960US7442651B2Plasma etching methodHITACHI HIGH TECH CORP·Filed 2006·Granted Oct 28, 2008·2 cites·8 claims
- 5060US5874013ASemiconductor integrated circuit arrangement fabrication methodHITACHI LTD·Filed 1997·Granted Feb 23, 1999·18 cites·99 claims
Showing the top 50 of 78 patent records by PatentIndex Score.
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