Inventor · disambiguated record
Tatsuro Okawa
Also filed as: OKAWA TATSURO
2 granted patents·2 pending applications·1 citations·filing 2012–2017
30Inventor score
Top patents by PatentIndex Score
4 records- 0159US8487281B2Electron beam exposure apparatus and electron beam exposure methodKUROKAWA MASAKI·Filed 2012·Granted Jul 16, 2013·1 cites·14 claims
- 0235US9607807B2Charged particle beam exposure apparatus suitable for drawing on line patterns, and exposure method using the sameADVANTEST CORP·Filed 2015·Granted Mar 28, 2017·0 cites·13 claims
- 0334US2018067402A1Exposure apparatus and computer readable non-transitory storage mediumADVANTEST CORP·Filed 2017·Application pending·0 cites
- 0432US2012312975A1Electron beam exposure apparatus and electron beam exposure methodKOBAYASHI KATSUHIKO·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →