Inventor · disambiguated record
Matthew Tsai
Also filed as: TSAI MATTHEW · TSAI MATTHEW C
4 granted patents·2 pending applications·61 citations·filing 1999–2014
78Inventor score
Top patents by PatentIndex Score
6 records- 0192US8852348B2Heat exchange pedestal with coating of diamond-like materialPARKHE VIJAY D·Filed 2010·Granted Oct 7, 2014·15 cites·23 claims
- 0285US10053778B2Cooling pedestal with coating of diamond-like carbonAPPLIED MATERIALS INC·Filed 2014·Granted Aug 21, 2018·5 cites·20 claims
- 0385US7824498B2Coating for reducing contamination of substrates during processingAPPLIED MATERIALS INC·Filed 2004·Granted Nov 2, 2010·28 cites·20 claims
- 0448US2005252454A1Contaminant reducing substrate transport and support systemAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 0543US6485603B1Method and apparatus for conserving energy within a process chamberAPPLIED MATERIALS INC·Filed 1999·Granted Nov 26, 2002·13 cites·18 claims
- 0633US2003049890A1Method for depaositing a leading wire layer of the semiconductorUNITED MICROELECTRONICS CORP·Filed 2001·Application pending·0 cites
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