Inventor · disambiguated record

Archana Subramaniyan

Also filed as: SUBRAMANIYAN ARCHANA

1 granted patent·3 citations·filing 2016–2016

21Inventor score

Technology areasH10P

Files withGLOBALFOUNDRIES INC1

Top patents by PatentIndex Score

1 record

0177US9704746B1Advanced self-aligned patterning process with sit spacer as a final dielectric etch hardmaskGLOBALFOUNDRIES INC·Filed 2016·Granted Jul 11, 2017·3 cites·20 claims

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