Inventor · disambiguated record
Philip Grunow
Also filed as: GRUNOW PHILIP · GRUNOW PHILIP A
3 granted patents·38 citations·filing 2001–2004
68Inventor score
Files withEUV LLC3
Top patents by PatentIndex Score
3 records- 0184US6772776B2Apparatus for in situ cleaning of carbon contaminated surfacesEUV LLC·Filed 2001·Granted Aug 10, 2004·23 cites·13 claims
- 0279US7147722B2Method for in-situ cleaning of carbon contaminated surfacesEUV LLC·Filed 2004·Granted Dec 12, 2006·15 cites·20 claims
- 0332US7740916B2Method for the protection of extreme ultraviolet lithography opticsEUV LLC·Filed 2004·Granted Jun 22, 2010·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →