Inventor · disambiguated record
Halil Gökay Yegen
Also filed as: YEGEN HALIL GÖKAY · YEǦEN HALIL GÖKAY
1 granted patent·2 pending applications·0 citations·filing 2020–2021
4Inventor score
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0163US2022276553A1Pellicle membrane for a lithographic apparatusASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
- 0251US12339588B2High force low voltage piezoelectric micromirror actuatorASML NETHERLANDS BV·Filed 2021·Granted Jun 24, 2025·0 cites·13 claims
- 0345US2024004184A1High accuracy temperature-compensated piezoresistive position sensing systemASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →