Inventor · disambiguated record

Yeh Lee-Chih

Also filed as: LEE-CHIH YEH

2 granted patents·3 citations·filing 2012–2013

37Inventor score

Technology areasG03F

Files withLEE HSIN-CHANG1 TAIWN SEMICONDUCTOR MFG COMPANY LTD1

Top patents by PatentIndex Score

2 records

0171US9256142B2Pellicle mounting system and methodTAIWN SEMICONDUCTOR MFG COMPANY LTD·Filed 2013·Granted Feb 9, 2016·3 cites·20 claims
0245US8656318B2System and method for combined intraoverlay metrology and defect inspectionLEE HSIN-CHANG·Filed 2012·Granted Feb 18, 2014·0 cites·19 claims

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Yeh Lee-Chih — Patent Inventor | PatentIndex