Inventor · disambiguated record
Matthew E. Colburn
Also filed as: COLBURN MATTHEW · COLBURN MATTHEW E · COLBURN MATTHEW EARL · PURUSHOTHAMAN SAMPATH
173 granted patents·48 pending applications·4,278 citations·filing 1999–2024
99Inventor score
Top patents by PatentIndex Score
221 records- 0199US11579364B2Gratings with variable depths formed using planarization for waveguide displaysMETA PLATFORMS TECH LLC·Filed 2022·Granted Feb 14, 2023·5 cites·7 claims
- 0299US10823887B1Diffraction grating with a variable refractive index using multiple resinsFACEBOOK TECH LLC·Filed 2018·Granted Nov 3, 2020·47 cites·20 claims
- 0399US10613268B1High refractive index gratings for waveguide displays manufactured by self-aligned stacked processFACEBOOK TECH LLC·Filed 2018·Granted Apr 7, 2020·38 cites·7 claims
- 0499US6719915B2Step and flash imprint lithographyUNIV TEXAS·Filed 2001·Granted Apr 13, 2004·251 cites·17 claims
- 0599US6334960B1Step and flash imprint lithographyUNIV TEXAS·Filed 1999·Granted Jan 1, 2002·822 cites·34 claims
- 0698US10983257B1Fabrication of self-aligned grating elements with high refractive index for waveguide displaysFACEBOOK TECH LLC·Filed 2018·Granted Apr 20, 2021·46 cites·16 claims
- 0798US10732351B2Gratings with variable depths formed using planarization for waveguide displaysFACEBOOK TECH LLC·Filed 2018·Granted Aug 4, 2020·45 cites·7 claims
- 0898US10569449B1Nanoimprint lithography system and methodFACEBOOK TECH LLC·Filed 2017·Granted Feb 25, 2020·47 cites·31 claims
- 0998US9934970B1Self aligned pattern formation post spacer etchback in tight pitch configurationsIBM·Filed 2017·Granted Apr 3, 2018·22 cites·13 claims
- 1098US7229273B2Imprint lithography template having a feature size under 250 nmUNIV TEXAS·Filed 2004·Granted Jun 12, 2007·80 cites·10 claims
- 1198US7037744B2Method for fabricating a self-aligned nanocolumnar airbridge and structure produced therebyIBM·Filed 2005·Granted May 2, 2006·84 cites·20 claims
- 1298US6921615B2High-resolution overlay alignment methods for imprint lithographyUNIV TEXAS·Filed 2001·Granted Jul 26, 2005·161 cites·26 claims
- 1398US6916585B2Method of varying template dimensions to achieve alignment during imprint lithographyUNIV TEXAS·Filed 2003·Granted Jul 12, 2005·108 cites·30 claims
- 1498US6842229B2Imprint lithography template comprising alignment marksUNIV TEXAS·Filed 2003·Granted Jan 11, 2005·132 cites·19 claims
- 1598US6696220B2Template for room temperature, low pressure micro-and nano-imprint lithographyUNIV TEXAS·Filed 2001·Granted Feb 24, 2004·606 cites·44 claims
- 1697US10534115B1Gray-tone electron-beam lithographyFACEBOOK TECH LLC·Filed 2017·Granted Jan 14, 2020·21 cites·20 claims
- 1797US9991156B2Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogsIBM·Filed 2016·Granted Jun 5, 2018·15 cites·6 claims
- 1897US8853085B1Grapho-epitaxy DSA process with dimension control of template patternIBM·Filed 2013·Granted Oct 7, 2014·47 cites·20 claims
- 1997US6986975B2Method of aligning a template with a substrate employing moire patternsUNIV TEXAS·Filed 2004·Granted Jan 17, 2006·73 cites·23 claims
- 2096US10895671B1Diffraction grating with a variable refractive index using ion implantationFACEBOOK TECH LLC·Filed 2018·Granted Jan 19, 2021·9 cites·20 claims
- 2196US10649141B1Gratings with variable etch heights for waveguide displaysFACEBOOK TECH LLC·Filed 2018·Granted May 12, 2020·15 cites·21 claims
- 2296US9779944B1Method and structure for cut material selectionIBM·Filed 2016·Granted Oct 3, 2017·17 cites·19 claims
- 2396US8298954B1Sidewall image transfer process employing a cap material layer for a metal nitride layerARNOLD JOHN C·Filed 2011·Granted Oct 30, 2012·29 cites·20 claims
- 2496US8119531B1Mask and etch process for pattern assemblyARNOLD JOHN C·Filed 2011·Granted Feb 21, 2012·30 cites·20 claims
- 2596US7883832B2Method and apparatus for direct referencing of top surface of workpiece during imprint lithographyIBM·Filed 2005·Granted Feb 8, 2011·42 cites·10 claims
- 2696US7862982B2Chemical trim of photoresist lines by means of a tuned overcoat materialIBM·Filed 2008·Granted Jan 4, 2011·21 cites·14 claims
- 2796US6911400B2Nonlithographic method to produce self-aligned mask, articles produced by same and compositions for sameIBM·Filed 2002·Granted Jun 28, 2005·79 cites·49 claims
- 2895US11455031B1In-field illumination for eye trackingMETA PLATFORMS TECH LLC·Filed 2018·Granted Sep 27, 2022·13 cites·20 claims
- 2995US11175455B1Gratings with variable etch heights for waveguide displaysFACEBOOK TECH LLC·Filed 2020·Granted Nov 16, 2021·3 cites·20 claims
- 3095US10996382B1Diffraction grating with a variable refractive index formed using an energy gradientFACEBOOK TECH LLC·Filed 2018·Granted May 4, 2021·11 cites·15 claims
- 3195US9305845B2Self-aligned quadruple patterning processIBM·Filed 2014·Granted Apr 5, 2016·17 cites·19 claims
- 3295US7790350B2Method and materials for patterning a neutral surfaceIBM·Filed 2007·Granted Sep 7, 2010·38 cites·20 claims
- 3395US7309649B2Method of forming closed air gap interconnects and structures formed therebyIBM·Filed 2006·Granted Dec 18, 2007·33 cites·15 claims
- 3495US6954275B2Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithographyBOARDS OF REGENTS THE UNIVERSI·Filed 2001·Granted Oct 11, 2005·94 cites·49 claims
- 3594US10976483B2Variable-etch-depth gratingsFACEBOOK TECH LLC·Filed 2020·Granted Apr 13, 2021·3 cites·25 claims
- 3694US10509327B1Variable neutral density filter for multi-beam interference lithography exposureFACEBOOK TECH LLC·Filed 2018·Granted Dec 17, 2019·4 cites·20 claims
- 3794US9040371B2Integration of dense and variable pitch fin structuresIBM·Filed 2013·Granted May 26, 2015·12 cites·16 claims
- 3894US8033814B2Device for holding a template for use in imprint lithographyUNIV TEXAS·Filed 2010·Granted Oct 11, 2011·10 cites·18 claims
- 3994US7393776B2Method of forming closed air gap interconnects and structures formed therebyIBM·Filed 2006·Granted Jul 1, 2008·26 cites·6 claims
- 4094US7361991B2Closed air gap interconnect structureIBM·Filed 2003·Granted Apr 22, 2008·67 cites·11 claims
- 4194US7303383B1Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marksUNIV TEXAS·Filed 2004·Granted Dec 4, 2007·29 cites·26 claims
- 4293US11789186B1Diffraction grating with a variable refractive index formed using an energy gradientMETA PLATFORMS TECH LLC·Filed 2021·Granted Oct 17, 2023·2 cites·9 claims
- 4393US10529569B2Self aligned pattern formation post spacer etchback in tight pitch configurationsIBM·Filed 2018·Granted Jan 7, 2020·5 cites·11 claims
- 4493US9087792B2Integration of dense and variable pitch fin structuresIBM·Filed 2013·Granted Jul 21, 2015·9 cites·4 claims
- 4593US8883649B2Sidewall image transfer processYIN YUNPENG·Filed 2011·Granted Nov 11, 2014·27 cites·21 claims
- 4693US8859433B2DSA grapho-epitaxy process with etch stop materialIBM·Filed 2013·Granted Oct 14, 2014·21 cites·25 claims
- 4793US7514361B2Selective thin metal cap processIBM·Filed 2007·Granted Apr 7, 2009·28 cites·6 claims
- 4893US7030495B2Method for fabricating a self-aligned nanocolumnar airbridge and structure produced therebyIBM·Filed 2004·Granted Apr 18, 2006·64 cites·14 claims
- 4993US6919152B2High resolution overlay alignment systems for imprint lithographyUNIV TEXAS·Filed 2003·Granted Jul 19, 2005·57 cites·28 claims
- 5092US9607886B1Self aligned conductive lines with relaxed overlayIBM·Filed 2016·Granted Mar 28, 2017·6 cites·20 claims
Showing the top 50 of 221 patent records by PatentIndex Score.
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