Inventor · disambiguated record

Teruaki Safu

Also filed as: SAFU TERUAKI

1 granted patent·0 citations·filing 2015–2015

4Inventor score

Technology areasH01J

Files withNUFLARE TECHNOLOGY INC1

Top patents by PatentIndex Score

1 record

0135US9530610B2Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beamsNUFLARE TECHNOLOGY INC·Filed 2015·Granted Dec 27, 2016·0 cites·3 claims

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