Inventor · disambiguated record
Youiti Machii
Also filed as: MACHII YOUITI
2 granted patents·1 pending application·21 citations·filing 2000–2009
62Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0188US8002860B2CMP abrasive, method for polishing substrate and method for manufacturing semiconductor device using the same, and additive for CMP abrasiveHITACHI CHEMICAL CO LTD·Filed 2009·Granted Aug 23, 2011·12 cites·25 claims
- 0266US7410409B1Abrasive compound for CMP, method for polishing substrate and method for manufacturing semiconductor device using the same, and additive for CMP abrasive compoundHITACHI CHEMICAL CO LTD·Filed 2000·Granted Aug 12, 2008·9 cites·19 claims
- 0347US2007169421A1CMP abrasive, method for polishing substrate and method for manufacturing semiconductor device using the same, and additive for CMP abrasiveKOYAMA NAOYUKI·Filed 2007·Application pending·0 cites
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