Inventor · disambiguated record

Mitsutaka Otani

Also filed as: OTANI MITSUTAKA

1 granted patent·3 citations·filing 2006–2006

20Inventor score

Technology areasG03F

Files withMAEDA KAZUHIKO1

Top patents by PatentIndex Score

1 record

0167US8211612B2Fluorine-containing polymer coating composition, method for forming fluorine-containing polymer film using coating composition, and method for forming photoresist or lithographic patternMAEDA KAZUHIKO·Filed 2006·Granted Jul 3, 2012·3 cites·12 claims

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