Inventor · disambiguated record
Florence Luo
Also filed as: LUO CI FLORENCE · LUO FLORENCE
2 granted patents·1 pending application·12 citations·filing 2002–2005
56Inventor score
Technology areasG03F
Files withASML HOLDING NV3
Top patents by PatentIndex Score
3 records- 0168US6847434B2Method and apparatus for a pellicle frame with porous filtering insertsASML HOLDING NV·Filed 2002·Granted Jan 25, 2005·9 cites·23 claims
- 0250US7619718B2Method and system for active purging of pellicle volumesASML HOLDING NV·Filed 2003·Granted Nov 17, 2009·3 cites·25 claims
- 0344US2005151955A1Method and apparatus for a reticle with purged pellicle-to-reticle gapASML HOLDING NV·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →