Inventor · disambiguated record
Suhwan Park
Also filed as: PARK SUHWAN
7 granted patents·6 pending applications·1 citations·filing 2020–2024
69Inventor score
Files withSAMSUNG ELECTRONICS CO LTD13
Top patents by PatentIndex Score
13 records- 0180US12165933B2Semiconductor substrate processing apparatus and semiconductor substrate measuring apparatus using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Dec 10, 2024·1 cites·20 claims
- 0262US12474393B2Terahertz probeSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Nov 18, 2025·0 cites·17 claims
- 0362US12469750B2Method of extracting properties of a layer on a waferSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Nov 11, 2025·0 cites·20 claims
- 0461US2025003734A1Material measurement system and methodSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0557US12196669B2Inspection apparatus and method of inspecting waferSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Jan 14, 2025·0 cites·20 claims
- 0655US11946881B2Inspection apparatus and inspection method using sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Apr 2, 2024·0 cites·20 claims
- 0755US11579167B2Probe for detecting near field and near-field detection system including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Feb 14, 2023·0 cites·20 claims
- 0855US2024152058A1Immersion lithographic systemSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0954US2024218561A1Thin-film deposition apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1052US2024019362A1Probe and inspection apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1147US2024021414A1Shock absorbing plate and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1239US2021366102A1Inspection apparatus of waferSAMSUNG ELECTRONICS CO LTD·Filed 2020·Application pending·0 cites
- 1334US11688623B2Wafer inspection apparatusesSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Jun 27, 2023·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →