Inventor · disambiguated record
Marcus Joseph Elisabeth Godfried Breukers
Also filed as: BREUKERS MARCUS JOSEPH ELISABE · BREUKERS MARCUS JOSEPH ELISABETH GODFRIED
4 granted patents·3 citations·filing 2004–2014
59Inventor score
Technology areasG03F
Top patents by PatentIndex Score
4 records- 0165US10175587B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Jan 8, 2019·1 cites·20 claims
- 0245US7148950B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 12, 2006·2 cites·11 claims
- 0338US8891063B2Lithographic apparatus and device manufacturing methodBREUKERS MARCUS JOSEPH ELISABETH GODFRIED·Filed 2011·Granted Nov 18, 2014·0 cites·17 claims
- 0438US7352436B2Lithographic apparatus, projection apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Apr 1, 2008·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →