Inventor · disambiguated record
Ching-Hai Yang
Also filed as: YANG CHING-HAI
11 granted patents·3 pending applications·179 citations·filing 2011–2025
85Inventor score
Top patents by PatentIndex Score
14 records- 0195US9536759B2Baking apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jan 3, 2017·168 cites·20 claims
- 0285US9855579B2Spin dispenser module substrate surface protection systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jan 2, 2018·7 cites·20 claims
- 0377US2025329541A1Method and system for manufacturing a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0473US2024377750A1Method and apparatus for coating photoresist over a substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0572US11806743B2Spin dispenser module substrate surface protection systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 7, 2023·0 cites·20 claims
- 0672US9081306B2Method of optimizing lithography tools utilizationTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Jul 14, 2015·2 cites·20 claims
- 0770US12400866B2Method and system for manufacturing a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 26, 2025·0 cites·20 claims
- 0866US12124168B2Method and apparatus for coating photoresist over a substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Oct 22, 2024·0 cites·20 claims
- 0965US9793143B2Semiconductor processing apparatus and method of operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Oct 17, 2017·2 cites·19 claims
- 1055US11344910B2Spin dispenser module substrate surface protection systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted May 31, 2022·0 cites·20 claims
- 1151US2020171623A1Wafer backside cleaning apparatus and method of cleaning wafer backsideTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Application pending·0 cites
- 1242US12265327B2Semiconductor manufacturing apparatus and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Apr 1, 2025·0 cites·20 claims
- 1339US9589820B2Semiconductor apparatus and adjustment methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 7, 2017·0 cites·19 claims
- 1434US8873020B2Cleaning nozzle for advanced lithography processYANG CHING-HAI·Filed 2011·Granted Oct 28, 2014·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Ching-Hai Yang files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →