Inventor · disambiguated record

Michael D. Steiman

Also filed as: STEIMAN MICHAEL D · STEIMAN MICHAEL DAVID

2 granted patents·48 citations·filing 2001–2001

62Inventor score

Technology areasB24B H10P

Files withLAM RES CORP2

Top patents by PatentIndex Score

2 records

0185US6641470B1Apparatus for accurate endpoint detection in supported polishing padsLAM RES CORP·Filed 2001·Granted Nov 4, 2003·43 cites·37 claims
0250US6716093B2Low friction gimbaled substrate holder for CMP apparatusLAM RES CORP·Filed 2001·Granted Apr 6, 2004·5 cites·25 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →