Inventor · disambiguated record
Paul Horn
Also filed as: HORN PAUL · HORN PAUL D
9 granted patents·48 citations·filing 1987–2017
84Inventor score
Top patents by PatentIndex Score
9 records- 0191US9645097B2In-line wafer edge inspection, wafer pre-alignment, and wafer cleaningKLA TENCOR CORP·Filed 2015·Granted May 9, 2017·10 cites·21 claims
- 0290US10563973B2All surface film metrology systemKLA TENCOR CORP·Filed 2016·Granted Feb 18, 2020·11 cites·16 claims
- 0385US9640449B2Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopyKLA TENCOR CORP·Filed 2015·Granted May 2, 2017·5 cites·21 claims
- 0469US9885656B2Line scan knife edge height sensor for semiconductor inspection and metrologyKLA TENCOR CORP·Filed 2015·Granted Feb 6, 2018·1 cites·20 claims
- 0562US9752992B2Variable image field curvature for object inspectionKLA TENCOR CORP·Filed 2015·Granted Sep 5, 2017·1 cites·18 claims
- 0654US4805461ATransducer and systems for high speed measurement of shock loadsUNIV WASHINGTON·Filed 1987·Granted Feb 21, 1989·20 cites·37 claims
- 0747US10317344B2Speed enhancement of chromatic confocal metrologyKLA TENCOR CORP·Filed 2017·Granted Jun 11, 2019·0 cites·13 claims
- 0846US9719943B2Wafer edge inspection with trajectory following edge profileKLA TENCOR CORP·Filed 2015·Granted Aug 1, 2017·0 cites·14 claims
- 0945US9885671B2Miniaturized imaging apparatus for wafer edgeKLA TENCOR CORP·Filed 2015·Granted Feb 6, 2018·0 cites·20 claims
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