Inventor · disambiguated record

Gau-Ming Lu

Also filed as: LU GAU-MING

3 granted patents·22 citations·filing 2001–2002

68Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG2

Top patents by PatentIndex Score

3 records

0161US6887793B2Method for plasma etching a wafer after backside grindingTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted May 3, 2005·10 cites·20 claims
0257US6740471B1Photoresist adhesion improvement on metal layer after photoresist rework by extra N2O treatmentFiled 2002·Granted May 25, 2004·8 cites·28 claims
0348US6652666B2Wet dip method for photoresist and polymer stripping without buffer treatment stepTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Nov 25, 2003·4 cites·22 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →