Inventor · disambiguated record
John Szilagyi
Also filed as: SZILAGYI JOHN
3 granted patents·3 pending applications·10 citations·filing 2018–2024
60Inventor score
Top patents by PatentIndex Score
6 records- 0191US12033845B2Laser-sustained plasma source based on colliding liquid jetsKLA CORP·Filed 2023·Granted Jul 9, 2024·2 cites·19 claims
- 0290US10690589B2Laser sustained plasma light source with forced flow through natural convectionKLA TENCOR CORP·Filed 2018·Granted Jun 23, 2020·8 cites·50 claims
- 0371US2024138048A1System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sourcesKLA CORP·Filed 2023·Application pending·0 cites
- 0459US11844172B2System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sourcesKLA CORP·Filed 2019·Granted Dec 12, 2023·0 cites·23 claims
- 0558US2024105440A1Pulse-assisted laser-sustained plasma in flowing high-pressure liquidsKLA CORP·Filed 2023·Application pending·0 cites
- 0653US2025353040A1Optical table cleaning devices and methods of cleaning optical tablesKLA CORP·Filed 2024·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →