Inventor · disambiguated record
Carl A. Sorensen
Also filed as: SORENSEN CARL · SORENSEN CARL A · SORENSEN CARL AKSEL KRAGH
62 granted patents·17 pending applications·1,226 citations·filing 1994–2023
98Inventor score
Files withAPPLIED MATERIALS INC32PAUL ECKE RANCH11RANCH PAUL ECKE8KUDELA JOZEF6APPLIED KOMATSU TECHNOLOGY INC5
Top patents by PatentIndex Score
79 records- 0198US9397380B2Guided wave applicator with non-gaseous dielectric for plasma chamberKUDELA JOZEF·Filed 2012·Granted Jul 19, 2016·191 cites·26 claims
- 0298US8992723B2RF bus and RF return bus for plasma chamber electrodeSORENSEN CARL A·Filed 2010·Granted Mar 31, 2015·157 cites·7 claims
- 0398US7518466B2Methods and apparatus for symmetrical and/or concentric radio frequency matching networksAPPLIED MATERIALS INC·Filed 2006·Granted Apr 14, 2009·63 cites·26 claims
- 0496US9382621B2Ground return for plasma processesCHOI SOO YOUNG·Filed 2010·Granted Jul 5, 2016·27 cites·33 claims
- 0596US7083702B2RF current return path for a large area substrate plasma reactorAPPLIED MATERIALS INC·Filed 2003·Granted Aug 1, 2006·60 cites·40 claims
- 0696US5815047AFast transition RF impedance matching network for plasma reactor ignitionAPPLIED MATERIALS INC·Filed 1995·Granted Sep 29, 1998·140 cites·29 claims
- 0795US6024044ADual frequency excitation of plasma for film depositionAPPLIED KOMATSU TECHNOLOGY INC·Filed 1997·Granted Feb 15, 2000·184 cites·7 claims
- 0895US5549756AOptical pyrometer for a thin film deposition systemAPPLIED MATERIALS INC·Filed 1994·Granted Aug 27, 1996·102 cites·32 claims
- 0994US12362149B2Film stress control for plasma enhanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 2023·Granted Jul 15, 2025·1 cites·20 claims
- 1092US6552297B2RF matching network with distributed outputsAPPLIED KOMATSU TECHNOLOGY INC·Filed 2001·Granted Apr 22, 2003·36 cites·38 claims
- 1192US6359250B1RF matching network with distributed outputsAPPLIED KOMATSU TECHNOLOGY INC·Filed 2000·Granted Mar 19, 2002·37 cites·36 claims
- 1291US8343592B2Asymmetrical RF drive for electrode of plasma chamberAPPLIED MATERIALS INC·Filed 2008·Granted Jan 1, 2013·13 cites·13 claims
- 1390US8147614B2Multi-gas flow diffuserWHITE JOHN M·Filed 2010·Granted Apr 3, 2012·5 cites·12 claims
- 1490US8004293B2Plasma processing chamber with ground member integrity indicator and method for using the sameAPPLIED MATERIALS INC·Filed 2006·Granted Aug 23, 2011·15 cites·25 claims
- 1589US5782974AMethod of depositing a thin film using an optical pyrometerAPPLIED MATERIALS INC·Filed 1996·Granted Jul 21, 1998·70 cites·30 claims
- 1688US6451390B1Deposition of TEOS oxide using pulsed RF plasmaAPPLIED MATERIALS INC·Filed 2000·Granted Sep 17, 2002·27 cites·5 claims
- 1787US11854771B2Film stress control for plasma enhanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 2021·Granted Dec 26, 2023·1 cites·15 claims
- 1887US11094508B2Film stress control for plasma enhanced chemical vapor depositionAPPLIED MATERIALS INC·Filed 2018·Granted Aug 17, 2021·3 cites·20 claims
- 1987US10304607B2RF choke for gas delivery to an RF driven electrode in a plasma processing apparatusAPPLIED MATERIALS INC·Filed 2017·Granted May 28, 2019·2 cites·7 claims
- 2087US8728586B2RF choke for gas delivery to an RF driven electrode in a plasma processing apparatusKUDELA JOZEF·Filed 2008·Granted May 20, 2014·5 cites·19 claims
- 2187US8062717B2RF current return path for a large area substrate plasma reactorBLONIGAN WENDELL·Filed 2006·Granted Nov 22, 2011·12 cites·20 claims
- 2287US10342POsteospermum plant named `Cape Daisy Congo`PAUL ECKE RANCH·Filed 1996·Granted Apr 21, 1998·5 cites·1 claims
- 2383USPP13343P2Osteospermum plant named ‘Malindi’PAUL ECKE RANCH·Filed 2001·Granted Dec 10, 2002·2 cites·1 claims
- 2481US10312475B2CVD thin film stress control method for display applicationAPPLIED MATERIALS INC·Filed 2017·Granted Jun 4, 2019·3 cites·19 claims
- 2581US9761365B2RF choke for gas delivery to an RF driven electrode in a plasma processing apparatusAPPLIED MATERIALS INC·Filed 2014·Granted Sep 12, 2017·3 cites·11 claims
- 2681USPP12240P2Osteospermum plant named ‘Dondo’PAUL ECKE RANCH INC·Filed 1999·Granted Nov 27, 2001·2 cites·1 claims
- 2778USPP14316P2Osteospermum plant named ‘Aknik’PAUL ECKE RANCH·Filed 2002·Granted Nov 25, 2003·1 cites·1 claims
- 2878USPP13321P2Osteospermum plant named ‘Akvarza’PAUL ECKE RANCH·Filed 2001·Granted Dec 3, 2002·1 cites·1 claims
- 2977US8365682B2Methods and apparatus for supporting substratesAPPLIED MATERIALS INC·Filed 2005·Granted Feb 5, 2013·5 cites·9 claims
- 3076US9048518B2Transmission line RF applicator for plasma chamberKUDELA JOZEF·Filed 2012·Granted Jun 2, 2015·5 cites·20 claims
- 3175US11532418B2RF choke for gas delivery to an RF driven electrode in a plasma processing apparatusAPPLIED MATERIALS INC·Filed 2020·Granted Dec 20, 2022·0 cites·20 claims
- 3275US9818580B2Transmission line RF applicator for plasma chamberAPPLIED MATERIALS INC·Filed 2015·Granted Nov 14, 2017·2 cites·19 claims
- 3373US2019198217A1Rf choke for gas delivery to an rf driven electrode in a plasma processing apparatusAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3472US10903048B2Substrate processing method and apparatus for controlling phase angles of harmonic signalsAPPLIED MATERIALS INC·Filed 2018·Granted Jan 26, 2021·2 cites·20 claims
- 3572US8853098B2Substrate support with gas introduction openingsKIM SAM H·Filed 2012·Granted Oct 7, 2014·2 cites·19 claims
- 3672USPP12263P2Osteospermum plant named ‘Aksillo’RANCH PAUL ECKE·Filed 1999·Granted Dec 11, 2001·1 cites·1 claims
- 3771US10981POsteospermum plant named `Durban`PAUL ECKE RANCH·Filed 1997·Granted Jun 29, 1999·1 cites·1 claims
- 3870US10886053B2RF choke for gas delivery to an RF driven electrode in a plasma processing apparatusAPPLIED MATERIALS INC·Filed 2019·Granted Jan 5, 2021·0 cites·10 claims
- 3970US9425026B2Systems and methods for improved radio frequency matching networksAPPLIED MATERIALS INC·Filed 2015·Granted Aug 23, 2016·1 cites·20 claims
- 4069US10389POsteospermum plant named `Cape Daisy Zulu`RANCH PAUL ECKE·Filed 1996·Granted May 12, 1998·1 cites·1 claims
- 4169US10340POsteospermum plant named `Cape Daisy Nairobi`PAUL ECKE RANCH·Filed 1996·Granted Apr 21, 1998·1 cites·1 claims
- 4269US10337POsteospermum plant named `Cape Daisy Lusaka`RANCH PAUL ECKE·Filed 1996·Granted Apr 21, 1998·1 cites·1 claims
- 4368US8691047B2Large area plasma processing chamber with at-electrode RF matchingSORENSEN CARL A·Filed 2010·Granted Apr 8, 2014·2 cites·5 claims
- 4467US2023272530A1Large-area high-density plasma processing chamber for flat panel displaysANWAR SUHAIL·Filed 2023·Application pending·0 cites
- 4566US8872428B2Plasma source with vertical gradientKUDELA JOZEF·Filed 2012·Granted Oct 28, 2014·2 cites·19 claims
- 4666US8163191B2Apparatus and methods for using high frequency chokes in a substrate deposition apparatusSORENSEN CARL A·Filed 2011·Granted Apr 24, 2012·1 cites·20 claims
- 4763US2013068161A1Gas delivery and distribution for uniform process in linear-type large-area plasma reactorWHITE JOHN M·Filed 2012·Application pending·0 cites
- 4862USPP11768P2Osteospermum plant named ‘Beira’PAUL ECKE RANCH INC·Filed 1999·Granted Feb 6, 2001·0 cites·1 claims
- 4961USPP15654P2Osteospermum plant named ‘Aknai’PAUL ECKE RANCH·Filed 2004·Granted Mar 15, 2005·0 cites·1 claims
- 5061US2016208380A1Gas delivery and distribution for uniform process in linear-type large-area plasma reactorAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
Showing the top 50 of 79 patent records by PatentIndex Score.
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