Inventor · disambiguated record
Nicholas Pornsin-Sirirak
Also filed as: PORNSIN-SIRIRAK NICHOLAS
2 granted patents·25 citations·filing 2002–2005
61Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC2
Top patents by PatentIndex Score
2 records- 0179US7618548B2Silicon-containing structure with deep etched features, and method of manufactureAPPLIED MATERIALS INC·Filed 2005·Granted Nov 17, 2009·7 cites·7 claims
- 0275US7074723B2Method of plasma etching a deeply recessed feature in a substrate using a plasma source gas modulated etchant systemAPPLIED MATERIALS INC·Filed 2002·Granted Jul 11, 2006·18 cites·51 claims
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