Inventor · disambiguated record
Norio Semba
Also filed as: SEMBA NORIO
15 granted patents·1,119 citations·filing 1995–2000
95Inventor score
Files withTOKYO ELECTRON LTD15
Top patents by PatentIndex Score
15 records- 0198US5826129ASubstrate processing systemTOKYO ELECTRON LTD·Filed 1995·Granted Oct 20, 1998·552 cites·23 claims
- 0290US6033475AResist processing apparatusTOKYO ELECTRON LTD·Filed 1995·Granted Mar 7, 2000·90 cites·12 claims
- 0384US5854953AMethod for developing treatmentTOKYO ELECTRON LTD·Filed 1997·Granted Dec 29, 1998·58 cites·18 claims
- 0483US5938847AMethod and apparatus for coating a film on an object being processedTOKYO ELECTRON LTD·Filed 1997·Granted Aug 17, 1999·58 cites·17 claims
- 0579US6015066ALiquid supplying deviceTOKYO ELECTRON LTD·Filed 1997·Granted Jan 18, 2000·44 cites·15 claims
- 0677US6332724B1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Dec 25, 2001·24 cites·19 claims
- 0777US5944894ASubstrate treatment systemTOKYO ELECTRON LTD·Filed 1997·Granted Aug 31, 1999·54 cites·19 claims
- 0874US6063439AProcessing apparatus and method using solutionTOKYO ELECTRON LTD·Filed 1998·Granted May 16, 2000·45 cites·17 claims
- 0970US6333003B1Treatment apparatus, treatment method, and impurity removing apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Dec 25, 2001·39 cites·6 claims
- 1069US6338474B1Air feeder provided with by-pass bypassing cooling section, substrate processing apparatus including the same, and air supply methodTOKYO ELECTRON LTD·Filed 2000·Granted Jan 15, 2002·13 cites·15 claims
- 1168US6368776B1Treatment apparatus and treatment methodTOKYO ELECTRON LTD·Filed 1999·Granted Apr 9, 2002·36 cites·23 claims
- 1268US5866307AResist processing method and resist processing systemTOKYO ELECTRON LTD·Filed 1997·Granted Feb 2, 1999·34 cites·22 claims
- 1365US6217657B1Resist processing system having process solution deaeration mechanismTOKYO ELECTRON LTD·Filed 1998·Granted Apr 17, 2001·28 cites·10 claims
- 1463US6268013B1Coating a resist film, with pretesting for particle contaminationTOKYO ELECTRON LTD·Filed 1999·Granted Jul 31, 2001·24 cites·22 claims
- 1555US6133981AProcessing systemTOKYO ELECTRON LTD·Filed 1998·Granted Oct 17, 2000·20 cites·17 claims
Join the waitlist — get patent alerts
Get an alert when Norio Semba files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →