Inventor · disambiguated record
Shosuke Endo
Also filed as: ENDO SHOSUKE
8 granted patents·1 pending application·1,660 citations·filing 1995–2020
93Inventor score
Files withTOKYO ELECTRON LTD9
Top patents by PatentIndex Score
9 records- 0198USD411516SGas diffusion plate for electrode of semiconductor wafer processing apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Jun 29, 1999·469 cites·1 claims
- 0297US6544380B2Plasma treatment method and apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Apr 8, 2003·104 cites·3 claims
- 0397US6074518APlasma processing apparatusTOKYO ELECTRON LTD·Filed 1999·Granted Jun 13, 2000·276 cites·3 claims
- 0497US6035804AProcess chamber apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Mar 14, 2000·452 cites·12 claims
- 0596US5698062APlasma treatment apparatus and methodTOKYO ELECTRON LTD·Filed 1995·Granted Dec 16, 1997·161 cites·3 claims
- 0693US7337745B1Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptorTOKYO ELECTRON LTD·Filed 2000·Granted Mar 4, 2008·83 cites·7 claims
- 0791US6391147B2Plasma treatment method and apparatusTOKYO ELECTRON LTD·Filed 2000·Granted May 21, 2002·49 cites·5 claims
- 0888US6106737APlasma treatment method utilizing an amplitude-modulated high frequency powerTOKYO ELECTRON LTD·Filed 1998·Granted Aug 22, 2000·66 cites·4 claims
- 0943US2022336238A1Heating/cooling device and heating/cooling methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
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