Inventor · disambiguated record
Chih-Ming Ke
Also filed as: KE CHIH-MING
49 granted patents·13 pending applications·447 citations·filing 1999–2025
98Inventor score
Files withTAIWAN SEMICONDUCTOR MFG28TAIWAN SEMICONDUCTOR MFG CO LTD27HUANG GUO-TSAI2CHEN YEN-LIANG1HSIEH CHANG-TSUN1
Top patents by PatentIndex Score
62 records- 0198US7252909B2Method to reduce CD non-uniformity in IC manufacturingTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Aug 7, 2007·199 cites·22 claims
- 0296US8837810B2System and method for alignment in semiconductor device fabricationCHEN YEN-LIANG·Filed 2012·Granted Sep 16, 2014·82 cites·20 claims
- 0393US10983005B2Spectroscopic overlay metrologyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Apr 20, 2021·6 cites·19 claims
- 0493US10281827B2Noise reduction for overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted May 7, 2019·5 cites·20 claims
- 0590US9053284B2Method and system for overlay controlTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jun 9, 2015·8 cites·20 claims
- 0689US10031426B2Method and system for overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jul 24, 2018·5 cites·20 claims
- 0786US8755045B2Detecting method for forming semiconductor deviceLIN JYUH-FUH·Filed 2012·Granted Jun 17, 2014·15 cites·19 claims
- 0885US9418199B2Method and apparatus for extracting systematic defectsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Aug 16, 2016·4 cites·20 claims
- 0984US7732109B2Method and system for improving critical dimension uniformityTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Jun 8, 2010·6 cites·21 claims
- 1083US10514612B2Method and system for overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 24, 2019·2 cites·20 claims
- 1183US8179536B2Measurement of overlay offset in semiconductor processingHUANG TE-CHIH·Filed 2010·Granted May 15, 2012·6 cites·20 claims
- 1282US7580129B2Method and system for improving accuracy of critical dimension metrologyTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Aug 25, 2009·8 cites·20 claims
- 1382US2025347865A1Optical fiber coupling structure for photonic packageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1481USRE45943EMeasurement of overlay offset in semiconductor processingTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Mar 22, 2016·3 cites·23 claims
- 1581US7796249B2Mask haze early detectionTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Sep 14, 2010·5 cites·20 claims
- 1680US9766554B2Method and apparatus for estimating focus and dose of an exposure processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 19, 2017·2 cites·20 claims
- 1780US7393616B2Line end spacing measurementTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Jul 1, 2008·6 cites·20 claims
- 1879US10866524B2Method and system for overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 15, 2020·1 cites·20 claims
- 1979US10684556B2Noise reduction for overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 16, 2020·1 cites·20 claims
- 2079US9097978B2Method and apparatus to characterize photolithography lens qualityHUANG GUO-TSAI·Filed 2012·Granted Aug 4, 2015·3 cites·20 claims
- 2177US10031997B1Forecasting wafer defects using frequency domain analysisTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jul 24, 2018·2 cites·20 claims
- 2277US8329360B2Method and apparatus of providing overlayHUANG GUO-TSAI·Filed 2009·Granted Dec 11, 2012·4 cites·18 claims
- 2376US9070622B2Systems and methods for similarity-based semiconductor process controlTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jun 30, 2015·4 cites·20 claims
- 2476US7897297B2Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin maskTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Mar 1, 2011·3 cites·18 claims
- 2576US2025306300A1Optical fiber coupling structure for photonic packageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2675US9201022B2Extraction of systematic defectsHU JIA-RUI·Filed 2011·Granted Dec 1, 2015·6 cites·20 claims
- 2774US7858404B2Measurement of overlay offset in semiconductor processingTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Dec 28, 2010·3 cites·9 claims
- 2874US6774044B2Reducing photoresist shrinkage via plasma treatmentTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Aug 10, 2004·19 cites·7 claims
- 2971US11513444B2Noise reduction for overlay controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Nov 29, 2022·0 cites·20 claims
- 3070US7259850B2Approach to improve ellipsometer modeling accuracy for solving material optical constants N & KTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Aug 21, 2007·8 cites·19 claims
- 3170US6979820B2CD SEM automatic focus methodology and apparatus for constant electron beam dosage controlTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Dec 27, 2005·9 cites·30 claims
- 3269US9594309B2Method and apparatus to characterize photolithography lens qualityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 14, 2017·1 cites·20 claims
- 3369US8027529B2System for improving critical dimension uniformityTAIWAN SEMICONDUCTOR MFG·Filed 2010·Granted Sep 27, 2011·1 cites·13 claims
- 3468US2023378003A1Method of manufacturing semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 3565US11656391B2Aperture design and methods thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 23, 2023·0 cites·20 claims
- 3665US7349086B2Systems and methods for optical measurementTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Mar 25, 2008·1 cites·22 claims
- 3764US10867116B2Forecasting wafer defects using frequency domain analysisTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 15, 2020·0 cites·20 claims
- 3864US10521548B2Forecasting wafer defects using frequency domain analysisTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 31, 2019·0 cites·20 claims
- 3963US12062582B2Method of manufacturing semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 13, 2024·0 cites·20 claims
- 4060US2025258338A1Optical device and method of manufactureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4159US2025246507A1Semiconductor device, semiconductor package and manufacturing method of semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4257US10663633B2Aperture design and methods thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted May 26, 2020·0 cites·20 claims
- 4355US9025130B2Method and apparatus for maintaining depth of focusTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted May 5, 2015·0 cites·20 claims
- 4455US8592107B2Method and apparatus of providing overlayTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Nov 26, 2013·0 cites·20 claims
- 4555US2024404962A1Package structure and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 4654US9360767B2Method and apparatus for maintaining depth of focusTAIWAN SEMICONDUCTOR MFG·Filed 2015·Granted Jun 7, 2016·0 cites·20 claims
- 4754US2024162109A1Package with Improved Heat Dissipation Efficiency and Method for Forming the SameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 4853US7135259B2Scatterometric method of monitoring hot plate temperature and facilitating critical dimension controlTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Nov 14, 2006·4 cites·20 claims
- 4953US2024329336A1Photonic device and method of manufactureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 5051US2007292771A1Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin maskTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
Showing the top 50 of 62 patent records by PatentIndex Score.
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