Inventor · disambiguated record
Sio On Lo
Also filed as: LO SIO ON
3 granted patents·1 pending application·12 citations·filing 2010–2019
61Inventor score
Top patents by PatentIndex Score
4 records- 0184US11387115B2Silicon mandrel etch after native oxide punch-throughMATTSON TECH INC·Filed 2019·Granted Jul 12, 2022·4 cites·10 claims
- 0281US9101954B2Geometries and patterns for surface texturing to increase deposition retentionAPPLIED MATERIALS INC·Filed 2013·Granted Aug 11, 2015·8 cites·17 claims
- 0343US8398779B2Non destructive selective deposition removal of non-metallic deposits from aluminum containing substratesBAO LIYUAN·Filed 2010·Granted Mar 19, 2013·0 cites·8 claims
- 0438US2017056935A1Method for removing aluminum fluoride contamination from semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
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