Inventor · disambiguated record
Josef Distl
Also filed as: DISTL JOSEF
2 granted patents·8 citations·filing 2002–2006
47Inventor score
Files withZEISS CARL SMT AG2
Top patents by PatentIndex Score
2 records- 0156US6824277B2Optical beam guidance system and method for preventing contamination of optical components contained thereinZEISS CARL SMT AG·Filed 2002·Granted Nov 30, 2004·8 cites·13 claims
- 0244US7551375B2Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assemblyZEISS CARL SMT AG·Filed 2006·Granted Jun 23, 2009·0 cites·27 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →