Inventor · disambiguated record
Craig R. Chaney
Also filed as: CHANEY CRAIG · CHANEY CRAIG R · CHANEY CRAIG RICHARD
45 granted patents·6 pending applications·221 citations·filing 2006–2024
97Inventor score
Files withAPPLIED MATERIALS INC14VARIAN SEMICONDUCTOR EQUIPMENT13VARIAN SEMICONDUCTOR EQUIPMENT ASS INC10CHANEY CRAIG R3BILOIU COSTEL2
Top patents by PatentIndex Score
51 records- 0197US11482397B1High output ion source, ion implanter, and method of operationAPPLIED MATERIALS INC·Filed 2021·Granted Oct 25, 2022·4 cites·20 claims
- 0296US7586109B2Technique for improving the performance and extending the lifetime of an ion source with gas dilutionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Sep 8, 2009·41 cites·21 claims
- 0395US11664192B2Temperature control for insertable target holder for solid dopant materialsAPPLIED MATERIALS INC·Filed 2021·Granted May 30, 2023·6 cites·14 claims
- 0495US11170973B2Temperature control for insertable target holder for solid dopant materialsAPPLIED MATERIALS INC·Filed 2020·Granted Nov 9, 2021·8 cites·14 claims
- 0595US7446326B2Technique for improving ion implanter productivityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Nov 4, 2008·29 cites·19 claims
- 0693US10854416B1Thermally isolated repeller and electrodesAPPLIED MATERIALS INC·Filed 2019·Granted Dec 1, 2020·9 cites·21 claims
- 0789US9287079B2Apparatus for dynamic temperature control of an ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Mar 15, 2016·9 cites·16 claims
- 0889US8809800B2Ion source and a method for in-situ cleaning thereofKOO BON-WOONG·Filed 2009·Granted Aug 19, 2014·11 cites·16 claims
- 0988US9142379B2Ion source and a method for in-situ cleaning thereofVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Sep 22, 2015·7 cites·11 claims
- 1088US7491947B2Technique for improving performance and extending lifetime of indirectly heated cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Feb 17, 2009·11 cites·14 claims
- 1187US9396902B2Gallium ION source and materials thereforeBILOIU COSTEL·Filed 2012·Granted Jul 19, 2016·9 cites·10 claims
- 1287US8501624B2Excited gas injection for ion implant controlKOO BON-WOONG·Filed 2008·Granted Aug 6, 2013·11 cites·6 claims
- 1385US7655932B2Techniques for providing ion source feed materialsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Feb 2, 2010·10 cites·27 claims
- 1484US10347457B1Dynamic temperature control of an ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jul 9, 2019·3 cites·20 claims
- 1584US9212785B2Passive isolation assembly and gas transport systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2012·Granted Dec 15, 2015·4 cites·19 claims
- 1684US8330127B2Flexible ion sourceLOW RUSSELL J·Filed 2008·Granted Dec 11, 2012·8 cites·17 claims
- 1784US7888662B2Ion source cleaning method and apparatusVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Feb 15, 2011·9 cites·20 claims
- 1881US10217654B1Embedded features for interlocks using additive manufacturingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Feb 26, 2019·2 cites·20 claims
- 1980US12400828B2Temperature control for insertable target holder for solid dopant materialsAPPLIED MATERIALS INC·Filed 2023·Granted Aug 26, 2025·0 cites·12 claims
- 2078US8003959B2Ion source cleaning end point detectionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Aug 23, 2011·4 cites·11 claims
- 2178US7723697B2Techniques for optical ion beam metrologyVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted May 25, 2010·4 cites·17 claims
- 2274US12469666B2Lattice based voltage standoffAPPLIED MATERIALS INC·Filed 2022·Granted Nov 11, 2025·0 cites·17 claims
- 2374US8263944B2Directional gas injection for an ion source cathode assemblyKOO JOHN BON-WOONG·Filed 2008·Granted Sep 11, 2012·6 cites·16 claims
- 2473US9018829B2Excited gas injection for ion implant controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Apr 28, 2015·2 cites·12 claims
- 2571US11239040B2Thermally isolated repeller and electrodesAPPLIED MATERIALS INC·Filed 2020·Granted Feb 1, 2022·0 cites·11 claims
- 2671US9741522B1Ceramic ion source chamberVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Aug 22, 2017·1 cites·18 claims
- 2770US12154754B2Molten liquid transport for tunable vaporization in ion sourcesAPPLIED MATERIALS INC·Filed 2022·Granted Nov 26, 2024·0 cites·19 claims
- 2869US10418223B1Foil sheet assemblies for ion implantationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Sep 17, 2019·1 cites·19 claims
- 2968US11996281B1System and method for introducing aluminum to an ion sourceAPPLIED MATERIALS INC·Filed 2023·Granted May 28, 2024·0 cites·20 claims
- 3068US8466431B2Techniques for improving extracted ion beam quality using high-transparency electrodesBUFF JAMES S·Filed 2009·Granted Jun 18, 2013·3 cites·20 claims
- 3168US8455839B2Cleaning of an extraction aperture of an ion sourceCHANEY CRAIG R·Filed 2010·Granted Jun 4, 2013·2 cites·14 claims
- 3268US8071956B2Cleaning of an extraction aperture of an ion sourceCHANEY CRAIG R·Filed 2010·Granted Dec 6, 2011·2 cites·19 claims
- 3364US10672634B2Embedded features for interlocks using additive manufacturingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Granted Jun 2, 2020·0 cites·17 claims
- 3464US8937003B2Technique for ion implanting a targetPEREL ALEXANDER S·Filed 2012·Granted Jan 20, 2015·2 cites·19 claims
- 3563US12431330B2Helical voltage standoffAPPLIED MATERIALS INC·Filed 2022·Granted Sep 30, 2025·0 cites·19 claims
- 3663US8003957B2Ethane implantation with a dilution gasVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Aug 23, 2011·2 cites·20 claims
- 3762US2025349494A1Thermally optimized arc chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3861US8592783B2Titanium diboride coating for plasma processing apparatusHADIDI KAMAL·Filed 2011·Granted Nov 26, 2013·0 cites·10 claims
- 3959US9887060B2Ceramic ion source chamberVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Feb 6, 2018·0 cites·21 claims
- 4059US2024412899A1Self-centering voltage standoffAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4157US10892136B2Ion source thermal gas bushingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jan 12, 2021·0 cites·18 claims
- 4256US2025144669A1Vibration reduction in ion implanters using embedded actuator forced attenuationAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4356US2025343022A1Captive spring hooks for reduced electrostatic stressAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4453US8912976B2Internal RF antenna with dielectric insulationPLATOW WILHELM P·Filed 2012·Granted Dec 16, 2014·1 cites·18 claims
- 4551US10535499B2Varied component density for thermal isolationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jan 14, 2020·0 cites·20 claims
- 4651US9928983B2Vaporizer for ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Mar 27, 2018·0 cites·17 claims
- 4749US8901820B2Ribbon antenna for versatile operation and efficient RF power couplingBILOIU COSTEL·Filed 2012·Granted Dec 2, 2014·0 cites·10 claims
- 4847US10221476B2Coating insulating materials for improved lifeVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Mar 5, 2019·0 cites·14 claims
- 4939US2011143527A1Techniques for generating uniform ion beamVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2010·Application pending·0 cites
- 5037US2012048723A1Sputter target feed systemCHANEY CRAIG R·Filed 2010·Application pending·0 cites
Showing the top 50 of 51 patent records by PatentIndex Score.
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