Inventor · disambiguated record

Heigo Tanaka

Also filed as: TANAKA HEIGO

2 granted patents·24 citations·filing 2000–2009

55Inventor score

Technology areasB24B

Files withSUMITOMO MITSUBISHI SILICON2

Top patents by PatentIndex Score

2 records

0179US7648409B1Double side polishing method and apparatusSUMITOMO MITSUBISHI SILICON·Filed 2000·Granted Jan 19, 2010·24 cites·13 claims
0248US8002610B2Double side polishing method and apparatusSUMITOMO MITSUBISHI SILICON·Filed 2009·Granted Aug 23, 2011·0 cites·8 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →