Inventor · disambiguated record
Atsuko Sekiguchi
Also filed as: SEKIGUCHI ATSUKO
3 granted patents·1 pending application·5 citations·filing 2015–2025
57Inventor score
Top patents by PatentIndex Score
4 records- 0186US11042085B2Pellicle film, pellicle frame, pellicle, method for producing same, original plate for light exposure, light exposure apparatus and method for manufacturing semiconductor deviceMITSUI CHEMICALS INC·Filed 2018·Granted Jun 22, 2021·4 cites·24 claims
- 0271US12287569B2Pellicle film for photolithography, pellicle, photolithography mask, photolithography system, and method of producing pellicle film for photolithographyMITSUI CHEMICALS INC·Filed 2021·Granted Apr 29, 2025·0 cites·14 claims
- 0371US10023715B2Elastomer structure containing carbon nanotubes and method for producing the sameAIST·Filed 2015·Granted Jul 17, 2018·1 cites·9 claims
- 0470US2025216772A1Pellicle film for photolithography, pellicle, photolithography mask, photolithography system, and method of producing pellicle film for photolithographyMITSUI CHEMICALS INC·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →