Inventor · disambiguated record
Haruna Kawashima
Also filed as: KAWASHIMA HARUNA
26 granted patents·3 pending applications·674 citations·filing 1989–2017
97Inventor score
Top patents by PatentIndex Score
29 records- 0192US5118957AMethod and apparatus for precisely detecting surface position of a patterned waferCANON KK·Filed 1991·Granted Jun 2, 1992·77 cites·55 claims
- 0290US5218415ADevice for optically detecting inclination of a surfaceCANON KK·Filed 1992·Granted Jun 8, 1993·69 cites·15 claims
- 0390US5162642ADevice for detecting the position of a surfaceCANON KK·Filed 1991·Granted Nov 10, 1992·75 cites·11 claims
- 0488US8077288B2Exposure apparatusKAWASHIMA HARUNA·Filed 2006·Granted Dec 13, 2011·13 cites·4 claims
- 0588US5117254AProjection exposure apparatusCANON KK·Filed 1991·Granted May 26, 1992·61 cites·60 claims
- 0686US5602400ASurface position detecting method and apparatus including detection and correction of errors, such as surface position errors or tilt, in exposure regionsCANON KK·Filed 1996·Granted Feb 11, 1997·62 cites·59 claims
- 0786US5323016AFocusing methodCANON KK·Filed 1993·Granted Jun 21, 1994·50 cites·35 claims
- 0886US4952970AAutofocusing system for a projecting exposure apparatusCANON KK·Filed 1989·Granted Aug 28, 1990·41 cites·30 claims
- 0983US7630058B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2008·Granted Dec 8, 2009·6 cites·10 claims
- 1080US5489966AProjection exposure apparatusCANON KK·Filed 1994·Granted Feb 6, 1996·33 cites·13 claims
- 1179US5414515ASurface position detecting deviceCANON KK·Filed 1993·Granted May 9, 1995·34 cites·56 claims
- 1272US5124562ASurface position detecting method at a predetermined and plurality of adjacent pointsCANON KK·Filed 1991·Granted Jun 23, 1992·26 cites·61 claims
- 1371US6023320AScanning exposure apparatus with surface position detecting systemCANON KK·Filed 1997·Granted Feb 8, 2000·31 cites·16 claims
- 1470US5955739ASurface position detection deviceCANON KK·Filed 1996·Granted Sep 21, 1999·29 cites·15 claims
- 1567US7145635B2Exposure method and apparatusCANON KK·Filed 2004·Granted Dec 5, 2006·8 cites·9 claims
- 1666US5751428AExposure method and exposure apparatus using the sameCANON KK·Filed 1995·Granted May 12, 1998·33 cites·13 claims
- 1763US7525656B2Exposure apparatus and device fabrication methodCANON KK·Filed 2006·Granted Apr 28, 2009·2 cites·13 claims
- 1862US7619716B2Exposure methodCANON KK·Filed 2006·Granted Nov 17, 2009·2 cites·10 claims
- 1958US6727982B2Illumination system with plural light sources, and exposure apparatus having the sameCANON KK·Filed 2001·Granted Apr 27, 2004·8 cites·36 claims
- 2056US10216092B2Light source apparatus, illumination device, exposure apparatus, and device manufacturing methodCANON KK·Filed 2017·Granted Feb 26, 2019·0 cites·26 claims
- 2155USD526217SWrist watchCASIO COMPUTER CO LTD·Filed 2005·Granted Aug 8, 2006·9 cites·1 claims
- 2254US9772560B2Light source apparatus, illumination device, exposure apparatus, and device manufacturing methodCANON KK·Filed 2015·Granted Sep 26, 2017·0 cites·16 claims
- 2350US7057820B2Projection optical systemCANON KK·Filed 2004·Granted Jun 6, 2006·2 cites·11 claims
- 2449US7880862B2Exposure apparatus and device fabrication methodCANON KK·Filed 2007·Granted Feb 1, 2011·0 cites·4 claims
- 2549US2010002209A1Exposure apparatus and method of manufacturing deviceCANON KK·Filed 2009·Application pending·0 cites
- 2647US8164754B2Immersion exposure apparatus and device manufacturing methodKAWASHIMA HARUNA·Filed 2009·Granted Apr 24, 2012·0 cites·9 claims
- 2738USD569293SButton for a watchCASIO COMPUTER CO LTD·Filed 2005·Granted May 20, 2008·3 cites·1 claims
- 2838US2005237502A1Exposure apparatusKAWASHIMA HARUNA·Filed 2005·Application pending·0 cites
- 2936US2003020893A1Exposure apparatus and method, and device fabricating methodFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →