Inventor · disambiguated record
Takao Ukaji
Also filed as: UKAJI TAKAO
12 granted patents·1 pending application·417 citations·filing 1985–2009
92Inventor score
Top patents by PatentIndex Score
13 records- 0197US4929893AWafer proberCANON KK·Filed 1988·Granted May 29, 1990·206 cites·14 claims
- 0284US6285457B2Exposure apparatus and device manufacturing method including measuring position and/or displacement of each of a base and a stage with respect to a supportCANON KK·Filed 1999·Granted Sep 4, 2001·55 cites·33 claims
- 0383US7686144B2Vibration isolation device, arithmetic apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2008·Granted Mar 30, 2010·9 cites·9 claims
- 0483US6654098B2Stage apparatus, exposure apparatus, and device production methodCANON KK·Filed 2000·Granted Nov 25, 2003·30 cites·27 claims
- 0582US6847132B2Electromagnetic actuator having an armature coil surrounded by heat-conducting anisotropy material and exposure apparatusCANON KK·Filed 2002·Granted Jan 25, 2005·28 cites·26 claims
- 0676US4934064AAlignment method in a wafer proberCANON KK·Filed 1988·Granted Jun 19, 1990·46 cites·5 claims
- 0774US7294906B2Wiring techniqueCANON KK·Filed 2004·Granted Nov 13, 2007·11 cites·10 claims
- 0858US9043182B2Absolute position measurement apparatus and methodSEO YUZO·Filed 2008·Granted May 26, 2015·3 cites·9 claims
- 0956US2010004869A1Vibration Isolation Device, Arithmetic Apparatus, Exposure Apparatus, and Device Manufacturing MethodCANON KK·Filed 2009·Application pending·0 cites
- 1055US7955938B2Wiring techniqueCANON KK·Filed 2007·Granted Jun 7, 2011·0 cites·17 claims
- 1155US5773953ASubstrate transfer systemCANON KK·Filed 1996·Granted Jun 30, 1998·20 cites·10 claims
- 1249US7081950B2Stage device and control method therefor, exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Granted Jul 25, 2006·2 cites·12 claims
- 1336US4779981AReject chip marking device and method of discriminating reject markCANON KK·Filed 1985·Granted Oct 25, 1988·7 cites·2 claims
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