Inventor · disambiguated record
Mitsumasa Kodama
Also filed as: KODAMA MITSUMASA
4 granted patents·151 citations·filing 1995–2003
80Inventor score
Technology areasH10P
Files withDAINIPPON SCREEN MFG4
Top patents by PatentIndex Score
4 records- 0191US6558053B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2002·Granted May 6, 2003·63 cites·39 claims
- 0287US6832863B2Substrate treating apparatus and methodDAINIPPON SCREEN MFG·Filed 2003·Granted Dec 21, 2004·41 cites·52 claims
- 0371US5639301AProcessing apparatus having parts for thermal and non-thermal treatment of substratesDAINIPPON SCREEN MFG·Filed 1995·Granted Jun 17, 1997·42 cites·21 claims
- 0455US7105074B2Substrate treating method and apparatusDAINIPPON SCREEN MFG·Filed 2002·Granted Sep 12, 2006·5 cites·31 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →