Inventor · disambiguated record
Kuo-Lung Tang
Also filed as: TANG KUO-LUNG
3 granted patents·1 pending application·21 citations·filing 2001–2006
67Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0171US6893969B2Use of ammonia for etching organic low-k dielectricsLAM RES CORP·Filed 2001·Granted May 17, 2005·14 cites·21 claims
- 0257US7049052B2Method providing an improved bi-layer photoresist patternLAM RES CORP·Filed 2003·Granted May 23, 2006·6 cites·15 claims
- 0345US7105454B2Use of ammonia for etching organic low-k dielectricsLAM RES CORP·Filed 2004·Granted Sep 12, 2006·1 cites·18 claims
- 0443US2006166145A1Method providing an improved bi-layer photoresist patternXIAO HANZHONG·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →